A high efficiency silicon nitride grating coupler

The experimental demonstration of a high efficiency silicon nitride grating coupler is reported for wavelengths from λ = 1.25 to 1.45 μm for TE polarization. At the resonant angle, a coupling efficiency higher than 60% has been measured.

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Bibliographische Detailangaben
Hauptverfasser:	Vivien, L., Maire, G., Sattler, G., Marris-Morini, D., Cassan, E., Laval, S., Kazmierczak, A., Giannone, D., Sanchez, B., Griol, A., Hill, D., Gylfason, K.B., Sohlstrom, H.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Coatings Electromagnetic waveguides Etching grating coupler Gratings microphotonics Nanophotonics Optical coupling Photonics Resonance Silicon silicon nitride Tellurium waveguide
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