Throughput Analysis of Linear Cluster Tools

In this paper, we analyze steady-state throughput and scheduling of linear cluster tools with single-blade robots in semiconductor manufacturing. We extend the existing research results in throughput and scheduling analysis for regular cluster tools to linear cluster tools. We analyze the tool'...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Jingang Yi, Shengwei Ding, Zhang, M.T., van der Meulen, P.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Job shop scheduling Manufacturing automation Production Pulp manufacturing Robotics and automation Robots Semiconductor device manufacture Steady-state Throughput USA Councils
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