Mass Flow Sensor Using Dual SAW Device

The application of SAW devices to a thermometric mass flow rate meter with a reference channel for temperature compensation is presented. The sensor is composed of a delay line device with two channels, namely a reference channel that does not come in contact with the fluid and a sensing channel tha...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Nomura, T., Saitoh, A., Koyama, K.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Acoustic measurements Delay lines Fluid flow measurement Gases Heat transfer Surface acoustic wave devices Surface acoustic waves Surface waves Temperature measurement Temperature sensors
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