A Rotary Micromotor Supported on Microball Bearings

We report the successful development of the first operational bottom-drive, rotary, variable- capacitance micromotor supported on microball bearings. The rotor and stator of the micromotor were fabricated using a 9-level-mask process. Silicon carbide coating was used for reducing friction of silicon...

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Bibliographische Detailangaben
Hauptverfasser: Ghalichechian, N., Modafe, A., Beyaz, M.I., Ghodssi, R.
Format: Tagungsbericht
Sprache:eng
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