A Low Power, Microvalve-Regulated Drug Delivery System using a SI Micro-Spring Pressurized Balloon Reservoir
This paper reports on a drug delivery system that provides modulated delivery of liquid-phase chemicals. The device uses silicon torsion springs on a 2×3 cm 2 chip to pressurize a soft polymeric reservoir and regulate flow with a piezoelectricaly actuated silicon microvalve that is 1.5×1.5×1 cm 3 ....
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