Recommendations for the Use of an Atomic Force Microscope as an In-Fab Stiction Monitor
An atomic force microscope (AFM) can be used to monitor stiction (by measuring the work of adhesion) at different stages of manufacture, which then might be correlated to device performance. The four main challenges to using the AFM as an in-fab stiction monitor are calibration, effects from the ang...
Gespeichert in:
| Veröffentlicht in: | Journal of microelectromechanical systems 2007-06, Vol.16 (3), p.694-699 |
|---|---|
| Hauptverfasser: | , , |
| Format: | Artikel |
| Sprache: | eng |
| Schlagworte: | |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | 699 |
|---|---|
| container_issue | 3 |
| container_start_page | 694 |
| container_title | Journal of microelectromechanical systems |
| container_volume | 16 |
| creator | Thoreson, E.J. Martin, J. Burnham, N.A. |
| description | An atomic force microscope (AFM) can be used to monitor stiction (by measuring the work of adhesion) at different stages of manufacture, which then might be correlated to device performance. The four main challenges to using the AFM as an in-fab stiction monitor are calibration, effects from the angle of repose of the cantilever, surface roughness, and material properties. We measured the work of adhesion between different AFM tips and samples. There were 17 tips of four different types, with radii from 200 nm to 60, covering the range of typical microelectromechanical systems (MEMS) contacts. The samples were unpatterned amorphous silicon dioxide MEMS die with two types of surface conditions (untreated and treated with a few angstroms of vapor-deposited diphenylsiloxane). A simple correction for the surface roughness resulted in the expected linear dependence for work of adhesion on radius, but the magnitudes were higher than expected. Commercial and heat-treated AFM tips have minimal surface roughness and result in magnitudes that were more reliable. In this paper, we review the four main challenges and show their influence on the measured work of adhesion, from which we develop a set of recommendations for the use of an AFM as an in-fab stiction monitor. |
| doi_str_mv | 10.1109/JMEMS.2006.879664 |
| format | Article |
| fullrecord | <record><control><sourceid>proquest_RIE</sourceid><recordid>TN_cdi_ieee_primary_4276820</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><ieee_id>4276820</ieee_id><sourcerecordid>34457922</sourcerecordid><originalsourceid>FETCH-LOGICAL-c451t-a4ac4b929576e9fec9b301beb6237ece6295c47f5d00d4448d577325920ff3883</originalsourceid><addsrcrecordid>eNqFkU-LFDEQxRtRcF39AOIlCK5eeqz8T47LsqMrOwiui8eQzlQwy3RnTHoOfnvTzqLgYT0lUL969ape172ksKIU7PtPm8vNzYoBqJXRVinxqDuhVtAeqDSP2x-k7jWV-mn3rNY7ACqEUSfdty8Y8jjitPVzylMlMRcyf0dyW5HkSPxEzuc8pkDWuQQkmxRKriHvkfi6VK-mfu0HcjOnsAiQTZ7SnMvz7kn0u4ov7t_T7nZ9-fXiY3_9-cPVxfl1H4Skc--FD2KwzEqt0EYMduBABxwU4xoDqlYJQke5BdiKZnkrteZMWgYxcmP4aff2qLsv-ccB6-zGVAPudn7CfKjOAleCSqsbefYgyYWQ2jLWwHcPglRp2kYDiP-jXFjBbfPZ0Nf_oHf5UKZ2G2dpmyoAlm3oEVqOXAtGty9p9OWno-CWnN3vnN2Sszvm3Hre3Av7GvwuFj-FVP82GiOVEYuBV0cuIeKfsmBaGQb8F87Prb4</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>912234008</pqid></control><display><type>article</type><title>Recommendations for the Use of an Atomic Force Microscope as an In-Fab Stiction Monitor</title><source>IEEE Electronic Library (IEL)</source><creator>Thoreson, E.J. ; Martin, J. ; Burnham, N.A.</creator><creatorcontrib>Thoreson, E.J. ; Martin, J. ; Burnham, N.A.</creatorcontrib><description>An atomic force microscope (AFM) can be used to monitor stiction (by measuring the work of adhesion) at different stages of manufacture, which then might be correlated to device performance. The four main challenges to using the AFM as an in-fab stiction monitor are calibration, effects from the angle of repose of the cantilever, surface roughness, and material properties. We measured the work of adhesion between different AFM tips and samples. There were 17 tips of four different types, with radii from 200 nm to 60, covering the range of typical microelectromechanical systems (MEMS) contacts. The samples were unpatterned amorphous silicon dioxide MEMS die with two types of surface conditions (untreated and treated with a few angstroms of vapor-deposited diphenylsiloxane). A simple correction for the surface roughness resulted in the expected linear dependence for work of adhesion on radius, but the magnitudes were higher than expected. Commercial and heat-treated AFM tips have minimal surface roughness and result in magnitudes that were more reliable. In this paper, we review the four main challenges and show their influence on the measured work of adhesion, from which we develop a set of recommendations for the use of an AFM as an in-fab stiction monitor.</description><identifier>ISSN: 1057-7157</identifier><identifier>EISSN: 1941-0158</identifier><identifier>DOI: 10.1109/JMEMS.2006.879664</identifier><identifier>CODEN: JMIYET</identifier><language>eng</language><publisher>New York, NY: IEEE</publisher><subject>Adhesion ; Adhesion tests ; Adhesives ; Atomic force microscopes ; Atomic force microscopy ; atomic force microscopy (AFM) ; Atomic measurements ; Exact sciences and technology ; Force measurement ; Heat treatment ; Instruments, apparatus, components and techniques common to several branches of physics and astronomy ; Manufacturing ; Mechanical instruments, equipment and techniques ; microelectromechanical (MEMS) devices ; Microelectromechanical systems ; Micromechanical devices ; Micromechanical devices and systems ; Microscopes ; Monitoring ; Monitors ; Physics ; R&D ; Research & development ; Rough surfaces ; Stiction ; Surface roughness ; Surface treatment ; Tips</subject><ispartof>Journal of microelectromechanical systems, 2007-06, Vol.16 (3), p.694-699</ispartof><rights>2007 INIST-CNRS</rights><rights>Copyright The Institute of Electrical and Electronics Engineers, Inc. (IEEE) 2007</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c451t-a4ac4b929576e9fec9b301beb6237ece6295c47f5d00d4448d577325920ff3883</citedby><cites>FETCH-LOGICAL-c451t-a4ac4b929576e9fec9b301beb6237ece6295c47f5d00d4448d577325920ff3883</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/4276820$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>314,780,784,796,27924,27925,54758</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/4276820$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=18856843$$DView record in Pascal Francis$$Hfree_for_read</backlink></links><search><creatorcontrib>Thoreson, E.J.</creatorcontrib><creatorcontrib>Martin, J.</creatorcontrib><creatorcontrib>Burnham, N.A.</creatorcontrib><title>Recommendations for the Use of an Atomic Force Microscope as an In-Fab Stiction Monitor</title><title>Journal of microelectromechanical systems</title><addtitle>JMEMS</addtitle><description>An atomic force microscope (AFM) can be used to monitor stiction (by measuring the work of adhesion) at different stages of manufacture, which then might be correlated to device performance. The four main challenges to using the AFM as an in-fab stiction monitor are calibration, effects from the angle of repose of the cantilever, surface roughness, and material properties. We measured the work of adhesion between different AFM tips and samples. There were 17 tips of four different types, with radii from 200 nm to 60, covering the range of typical microelectromechanical systems (MEMS) contacts. The samples were unpatterned amorphous silicon dioxide MEMS die with two types of surface conditions (untreated and treated with a few angstroms of vapor-deposited diphenylsiloxane). A simple correction for the surface roughness resulted in the expected linear dependence for work of adhesion on radius, but the magnitudes were higher than expected. Commercial and heat-treated AFM tips have minimal surface roughness and result in magnitudes that were more reliable. In this paper, we review the four main challenges and show their influence on the measured work of adhesion, from which we develop a set of recommendations for the use of an AFM as an in-fab stiction monitor.</description><subject>Adhesion</subject><subject>Adhesion tests</subject><subject>Adhesives</subject><subject>Atomic force microscopes</subject><subject>Atomic force microscopy</subject><subject>atomic force microscopy (AFM)</subject><subject>Atomic measurements</subject><subject>Exact sciences and technology</subject><subject>Force measurement</subject><subject>Heat treatment</subject><subject>Instruments, apparatus, components and techniques common to several branches of physics and astronomy</subject><subject>Manufacturing</subject><subject>Mechanical instruments, equipment and techniques</subject><subject>microelectromechanical (MEMS) devices</subject><subject>Microelectromechanical systems</subject><subject>Micromechanical devices</subject><subject>Micromechanical devices and systems</subject><subject>Microscopes</subject><subject>Monitoring</subject><subject>Monitors</subject><subject>Physics</subject><subject>R&D</subject><subject>Research & development</subject><subject>Rough surfaces</subject><subject>Stiction</subject><subject>Surface roughness</subject><subject>Surface treatment</subject><subject>Tips</subject><issn>1057-7157</issn><issn>1941-0158</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2007</creationdate><recordtype>article</recordtype><sourceid>RIE</sourceid><recordid>eNqFkU-LFDEQxRtRcF39AOIlCK5eeqz8T47LsqMrOwiui8eQzlQwy3RnTHoOfnvTzqLgYT0lUL969ape172ksKIU7PtPm8vNzYoBqJXRVinxqDuhVtAeqDSP2x-k7jWV-mn3rNY7ACqEUSfdty8Y8jjitPVzylMlMRcyf0dyW5HkSPxEzuc8pkDWuQQkmxRKriHvkfi6VK-mfu0HcjOnsAiQTZ7SnMvz7kn0u4ov7t_T7nZ9-fXiY3_9-cPVxfl1H4Skc--FD2KwzEqt0EYMduBABxwU4xoDqlYJQke5BdiKZnkrteZMWgYxcmP4aff2qLsv-ccB6-zGVAPudn7CfKjOAleCSqsbefYgyYWQ2jLWwHcPglRp2kYDiP-jXFjBbfPZ0Nf_oHf5UKZ2G2dpmyoAlm3oEVqOXAtGty9p9OWno-CWnN3vnN2Sszvm3Hre3Av7GvwuFj-FVP82GiOVEYuBV0cuIeKfsmBaGQb8F87Prb4</recordid><startdate>20070601</startdate><enddate>20070601</enddate><creator>Thoreson, E.J.</creator><creator>Martin, J.</creator><creator>Burnham, N.A.</creator><general>IEEE</general><general>Institute of Electrical and Electronics Engineers</general><general>The Institute of Electrical and Electronics Engineers, Inc. (IEEE)</general><scope>97E</scope><scope>RIA</scope><scope>RIE</scope><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>7TB</scope><scope>7U5</scope><scope>8FD</scope><scope>FR3</scope><scope>L7M</scope><scope>F28</scope></search><sort><creationdate>20070601</creationdate><title>Recommendations for the Use of an Atomic Force Microscope as an In-Fab Stiction Monitor</title><author>Thoreson, E.J. ; Martin, J. ; Burnham, N.A.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c451t-a4ac4b929576e9fec9b301beb6237ece6295c47f5d00d4448d577325920ff3883</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2007</creationdate><topic>Adhesion</topic><topic>Adhesion tests</topic><topic>Adhesives</topic><topic>Atomic force microscopes</topic><topic>Atomic force microscopy</topic><topic>atomic force microscopy (AFM)</topic><topic>Atomic measurements</topic><topic>Exact sciences and technology</topic><topic>Force measurement</topic><topic>Heat treatment</topic><topic>Instruments, apparatus, components and techniques common to several branches of physics and astronomy</topic><topic>Manufacturing</topic><topic>Mechanical instruments, equipment and techniques</topic><topic>microelectromechanical (MEMS) devices</topic><topic>Microelectromechanical systems</topic><topic>Micromechanical devices</topic><topic>Micromechanical devices and systems</topic><topic>Microscopes</topic><topic>Monitoring</topic><topic>Monitors</topic><topic>Physics</topic><topic>R&D</topic><topic>Research & development</topic><topic>Rough surfaces</topic><topic>Stiction</topic><topic>Surface roughness</topic><topic>Surface treatment</topic><topic>Tips</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Thoreson, E.J.</creatorcontrib><creatorcontrib>Martin, J.</creatorcontrib><creatorcontrib>Burnham, N.A.</creatorcontrib><collection>IEEE All-Society Periodicals Package (ASPP) 2005-present</collection><collection>IEEE All-Society Periodicals Package (ASPP) 1998-Present</collection><collection>IEEE Electronic Library (IEL)</collection><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Electronics & Communications Abstracts</collection><collection>Mechanical & Transportation Engineering Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Engineering Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><collection>ANTE: Abstracts in New Technology & Engineering</collection><jtitle>Journal of microelectromechanical systems</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Thoreson, E.J.</au><au>Martin, J.</au><au>Burnham, N.A.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Recommendations for the Use of an Atomic Force Microscope as an In-Fab Stiction Monitor</atitle><jtitle>Journal of microelectromechanical systems</jtitle><stitle>JMEMS</stitle><date>2007-06-01</date><risdate>2007</risdate><volume>16</volume><issue>3</issue><spage>694</spage><epage>699</epage><pages>694-699</pages><issn>1057-7157</issn><eissn>1941-0158</eissn><coden>JMIYET</coden><abstract>An atomic force microscope (AFM) can be used to monitor stiction (by measuring the work of adhesion) at different stages of manufacture, which then might be correlated to device performance. The four main challenges to using the AFM as an in-fab stiction monitor are calibration, effects from the angle of repose of the cantilever, surface roughness, and material properties. We measured the work of adhesion between different AFM tips and samples. There were 17 tips of four different types, with radii from 200 nm to 60, covering the range of typical microelectromechanical systems (MEMS) contacts. The samples were unpatterned amorphous silicon dioxide MEMS die with two types of surface conditions (untreated and treated with a few angstroms of vapor-deposited diphenylsiloxane). A simple correction for the surface roughness resulted in the expected linear dependence for work of adhesion on radius, but the magnitudes were higher than expected. Commercial and heat-treated AFM tips have minimal surface roughness and result in magnitudes that were more reliable. In this paper, we review the four main challenges and show their influence on the measured work of adhesion, from which we develop a set of recommendations for the use of an AFM as an in-fab stiction monitor.</abstract><cop>New York, NY</cop><pub>IEEE</pub><doi>10.1109/JMEMS.2006.879664</doi><tpages>6</tpages></addata></record> |
| fulltext | fulltext_linktorsrc |
| identifier | ISSN: 1057-7157 |
| ispartof | Journal of microelectromechanical systems, 2007-06, Vol.16 (3), p.694-699 |
| issn | 1057-7157 1941-0158 |
| language | eng |
| recordid | cdi_ieee_primary_4276820 |
| source | IEEE Electronic Library (IEL) |
| subjects | Adhesion Adhesion tests Adhesives Atomic force microscopes Atomic force microscopy atomic force microscopy (AFM) Atomic measurements Exact sciences and technology Force measurement Heat treatment Instruments, apparatus, components and techniques common to several branches of physics and astronomy Manufacturing Mechanical instruments, equipment and techniques microelectromechanical (MEMS) devices Microelectromechanical systems Micromechanical devices Micromechanical devices and systems Microscopes Monitoring Monitors Physics R&D Research & development Rough surfaces Stiction Surface roughness Surface treatment Tips |
| title | Recommendations for the Use of an Atomic Force Microscope as an In-Fab Stiction Monitor |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2024-12-27T13%3A34%3A32IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_RIE&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Recommendations%20for%20the%20Use%20of%20an%20Atomic%20Force%20Microscope%20as%20an%20In-Fab%20Stiction%20Monitor&rft.jtitle=Journal%20of%20microelectromechanical%20systems&rft.au=Thoreson,%20E.J.&rft.date=2007-06-01&rft.volume=16&rft.issue=3&rft.spage=694&rft.epage=699&rft.pages=694-699&rft.issn=1057-7157&rft.eissn=1941-0158&rft.coden=JMIYET&rft_id=info:doi/10.1109/JMEMS.2006.879664&rft_dat=%3Cproquest_RIE%3E34457922%3C/proquest_RIE%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_pqid=912234008&rft_id=info:pmid/&rft_ieee_id=4276820&rfr_iscdi=true |