Characterization of the Remote Plasma Generated in a Pulsed-DC Gas-Flow Hollow-Cathode Discharge

In this paper, the remote plasma generated in a pulsed-dc powered gas-flow hollow-cathode discharge in Ar with Al and Cu targets used for reactive sputter-deposition processes was investigated using time-resolved optical emission spectroscopy and Langmuir probe measurements. It was found that the Ar...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Veröffentlicht in:	IEEE transactions on plasma science 2007-06, Vol.35 (3), p.527-533
Hauptverfasser:	Paduraru, C., Becker, K.H., Belkind, A., Lopez, J.L., Gonzalvo, Y.A.
Format:	Artikel
Sprache:	eng
Schlagworte:	Aluminum Argon Character generation Chemical elements Decay rate Discharge Electric and magnetic measurements Electric currents Electrodes Electron emission Electron temperature Electrons Emission Exact sciences and technology hollow cathode Langmuir probe Measurement techniques Optical (ultraviolet, visible, infrared) measurements Optical emission spectroscopy Optical pulse generation Physics Physics of gases, plasmas and electric discharges Physics of plasmas and electric discharges Plasma Plasma density Plasma diagnostic techniques and instrumentation Plasma measurements Plasma potentials Plasma sheaths Plasma temperature Pulse generation Pulse measurements pulsed-power Spectrum analysis time-resolved
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Schreiben Sie den ersten Kommentar!