A Novel Micro/Nano Electromechanical Actuator with Integral Electrodes

A novel electromechanical actuator (patent pending) is presented, based on the beam-like deformation of two parallel electrodes, both mounted together in the same device and with a small gap in between. It avoids the need of an actuator electrode placed on the substrate. Simulations, mainly performe...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Pallares, J., Carmona, M., Duch, M., Gerboles, M., Teres, L.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Actuators Analytical models Birds Electrodes Electrostatics Micromechanical devices Micromirrors Microswitches Research and development Voltage
Online-Zugang:	Volltext bestellen
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