Application of Higher Order Derivatives Method to Parametric Simulation of MEMS

The paper demonstrates the advanced simulation methodology based on differentiation of the discretized finite element (FE) equations to parametric simulation of micro-electro-mechanical-systems (MEMS). The idea of the approach is to compute not only the governing system matrices but also high order...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Kolchuzhin, Vladimir, Mehner, Jan, Gessner, Thomas, Doetzel, Wolfram
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Analytical models Circuits Computational modeling Finite element methods Frequency response Iron Microelectromechanical devices Micromechanical devices Shape Taylor series
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