Hollow Cathode Glow Discharge for Plasma Ion Implantation

Summary form only given. Hollow cathode glow discharge has been investigated and utilized in plasma ion implantation. In this mode, local plasma ion implantation can be performed. The hollow cathode glow discharge is sustained by a radio-frequency source and the discharge behavior is investigated in...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Yang, S.Q., Jiang, H.F., Cui, J.T., Tian, X.B., Fu, Ricky K.Y., Chu, Paul K.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Argon Cathodes Fault location Fluid flow Glow discharges Ion implantation Nitrogen Plasma immersion ion implantation Plasma sources Radio frequency
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