Design and Analysis of Electro-mechanical Characteristics of Micromachined Stainless Steel Pressure Sensor
In this paper, electro-mechanical characteristics of stainless steel diaphragm have been studied as a potential robust substrate and a diaphragm material for micromachined devices. Lamination process techniques combined with traditional micromachining processes have been investigated as suitable fab...
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| creator | Heung-Shik Lee Chongdu Cho Sung Pil Chang |
| description | In this paper, electro-mechanical characteristics of stainless steel diaphragm have been studied as a potential robust substrate and a diaphragm material for micromachined devices. Lamination process techniques combined with traditional micromachining processes have been investigated as suitable fabrication technologies. To illustrate these principles, capacitive pressure sensors based on a stainless steel diaphragm have been designed, fabricated and characterized. Each sensor uses a stainless steel substrate, a laminated stainless steel film as a suspended movable plate and a fixed, surface micromachined back electrode of electroplated nickel. The finite element method is adopted to investigate residual stresses formed in the process. The sensitivity of the device fabricated using these technologies is 9.03 ppm kPa-1 with a net capacitance change of 0.14 pF over a range 0~178 kPa. |
| doi_str_mv | 10.1109/ICSENS.2007.355804 |
| format | Conference Proceeding |
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Lamination process techniques combined with traditional micromachining processes have been investigated as suitable fabrication technologies. To illustrate these principles, capacitive pressure sensors based on a stainless steel diaphragm have been designed, fabricated and characterized. Each sensor uses a stainless steel substrate, a laminated stainless steel film as a suspended movable plate and a fixed, surface micromachined back electrode of electroplated nickel. The finite element method is adopted to investigate residual stresses formed in the process. The sensitivity of the device fabricated using these technologies is 9.03 ppm kPa-1 with a net capacitance change of 0.14 pF over a range 0~178 kPa.</description><identifier>ISSN: 1930-0395</identifier><identifier>ISBN: 1424403758</identifier><identifier>ISBN: 9781424403752</identifier><identifier>EISSN: 2168-9229</identifier><identifier>EISBN: 9781424403769</identifier><identifier>EISBN: 1424403766</identifier><identifier>DOI: 10.1109/ICSENS.2007.355804</identifier><language>eng</language><publisher>IEEE</publisher><subject>Building materials ; Capacitive sensors ; Electrodes ; Fabrication ; Lamination ; Micromachining ; Robustness ; Sensor phenomena and characterization ; Steel ; Substrates</subject><ispartof>2006 5th IEEE Conference on Sensors, 2006, p.1043-1048</ispartof><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/4178799$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>309,310,780,784,789,790,2058,27925,54920</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/4178799$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Heung-Shik Lee</creatorcontrib><creatorcontrib>Chongdu Cho</creatorcontrib><creatorcontrib>Sung Pil Chang</creatorcontrib><title>Design and Analysis of Electro-mechanical Characteristics of Micromachined Stainless Steel Pressure Sensor</title><title>2006 5th IEEE Conference on Sensors</title><addtitle>ICSENS</addtitle><description>In this paper, electro-mechanical characteristics of stainless steel diaphragm have been studied as a potential robust substrate and a diaphragm material for micromachined devices. Lamination process techniques combined with traditional micromachining processes have been investigated as suitable fabrication technologies. To illustrate these principles, capacitive pressure sensors based on a stainless steel diaphragm have been designed, fabricated and characterized. Each sensor uses a stainless steel substrate, a laminated stainless steel film as a suspended movable plate and a fixed, surface micromachined back electrode of electroplated nickel. The finite element method is adopted to investigate residual stresses formed in the process. The sensitivity of the device fabricated using these technologies is 9.03 ppm kPa-1 with a net capacitance change of 0.14 pF over a range 0~178 kPa.</description><subject>Building materials</subject><subject>Capacitive sensors</subject><subject>Electrodes</subject><subject>Fabrication</subject><subject>Lamination</subject><subject>Micromachining</subject><subject>Robustness</subject><subject>Sensor phenomena and characterization</subject><subject>Steel</subject><subject>Substrates</subject><issn>1930-0395</issn><issn>2168-9229</issn><isbn>1424403758</isbn><isbn>9781424403752</isbn><isbn>9781424403769</isbn><isbn>1424403766</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>2006</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><sourceid>RIE</sourceid><recordid>eNo1jMlOwzAURc0k0Zb-AGz8AynPU2wvq1KgUhmkwLpy7BfqKk2QHRb9eyqG1TnSubqEXDOYMQb2drWols_VjAPomVDKgDwhU6sNk1xKELq0p2TEWWkKy7k9I-P_oMw5GTEroABh1SUZ57wD4KC4GZHdHeb40VHXBTrvXHvIMdO-ocsW_ZD6Yo9-67roXUsXW5ecHzDFPET_s3qKPvV757exw0CrwcWuxZyPhtjS13T0r4S0wi736YpcNK7NOP3jhLzfL98Wj8X65WG1mK-LyLQaCsuYKktTG91YCRAUeFbymgkRsIRGS-4NmtrZUnvU1jTSKxUC57VzjQ1BTMjN729ExM1ninuXDhvJtNHWim8AAV3F</recordid><startdate>200610</startdate><enddate>200610</enddate><creator>Heung-Shik Lee</creator><creator>Chongdu Cho</creator><creator>Sung Pil Chang</creator><general>IEEE</general><scope>6IE</scope><scope>6IH</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIO</scope></search><sort><creationdate>200610</creationdate><title>Design and Analysis of Electro-mechanical Characteristics of Micromachined Stainless Steel Pressure Sensor</title><author>Heung-Shik Lee ; Chongdu Cho ; Sung Pil Chang</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-i175t-9115668b87f9400d50c162b133de60f742c8e8ba967ce798f4c55dd22baaf9dd3</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>2006</creationdate><topic>Building materials</topic><topic>Capacitive sensors</topic><topic>Electrodes</topic><topic>Fabrication</topic><topic>Lamination</topic><topic>Micromachining</topic><topic>Robustness</topic><topic>Sensor phenomena and characterization</topic><topic>Steel</topic><topic>Substrates</topic><toplevel>online_resources</toplevel><creatorcontrib>Heung-Shik Lee</creatorcontrib><creatorcontrib>Chongdu Cho</creatorcontrib><creatorcontrib>Sung Pil Chang</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan (POP) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE Electronic Library Online</collection><collection>IEEE Proceedings Order Plans (POP) 1998-present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Heung-Shik Lee</au><au>Chongdu Cho</au><au>Sung Pil Chang</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>Design and Analysis of Electro-mechanical Characteristics of Micromachined Stainless Steel Pressure Sensor</atitle><btitle>2006 5th IEEE Conference on Sensors</btitle><stitle>ICSENS</stitle><date>2006-10</date><risdate>2006</risdate><spage>1043</spage><epage>1048</epage><pages>1043-1048</pages><issn>1930-0395</issn><eissn>2168-9229</eissn><isbn>1424403758</isbn><isbn>9781424403752</isbn><eisbn>9781424403769</eisbn><eisbn>1424403766</eisbn><abstract>In this paper, electro-mechanical characteristics of stainless steel diaphragm have been studied as a potential robust substrate and a diaphragm material for micromachined devices. Lamination process techniques combined with traditional micromachining processes have been investigated as suitable fabrication technologies. To illustrate these principles, capacitive pressure sensors based on a stainless steel diaphragm have been designed, fabricated and characterized. Each sensor uses a stainless steel substrate, a laminated stainless steel film as a suspended movable plate and a fixed, surface micromachined back electrode of electroplated nickel. The finite element method is adopted to investigate residual stresses formed in the process. The sensitivity of the device fabricated using these technologies is 9.03 ppm kPa-1 with a net capacitance change of 0.14 pF over a range 0~178 kPa.</abstract><pub>IEEE</pub><doi>10.1109/ICSENS.2007.355804</doi><tpages>6</tpages></addata></record> |
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| identifier | ISSN: 1930-0395 |
| ispartof | 2006 5th IEEE Conference on Sensors, 2006, p.1043-1048 |
| issn | 1930-0395 2168-9229 |
| language | eng |
| recordid | cdi_ieee_primary_4178799 |
| source | IEEE Electronic Library (IEL) Conference Proceedings |
| subjects | Building materials Capacitive sensors Electrodes Fabrication Lamination Micromachining Robustness Sensor phenomena and characterization Steel Substrates |
| title | Design and Analysis of Electro-mechanical Characteristics of Micromachined Stainless Steel Pressure Sensor |
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