Fabrication of Polymer-based Flexible Tactile Sensing Module with Metal Strain Gauges and Interconnecter
We present fabrication of flexible tactile sensing module with NiCr strain gauge as sensing element and interconnecter for signal treatment by polymer MEMS (micro electro mechanical system) technologies using polyimide materials. The tactile sensor array is composed of 16 times 16 sensing elements w...
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| creator | Kang Ryeol Lee Kunnyun Kim Yong-Kook Kim Dae-Sung Lee Won Hyo Kim Nam-Kyu Cho Kwang-Bum Park Kyu-Sik Shin Hyo-Derk Park |
| description | We present fabrication of flexible tactile sensing module with NiCr strain gauge as sensing element and interconnecter for signal treatment by polymer MEMS (micro electro mechanical system) technologies using polyimide materials. The tactile sensor array is composed of 16 times 16 sensing elements with 2 mm times 2 mm cell size and its overall size is 4 cm times 5 cm. Both the tactile sensor array and interconnecter are placed in the sensing module during the fabrication process. The fabricated tactile sensing module is measured continuously in the normal force range of 0~1 N with tactile sensor evaluation system. The variation of resistance is relatively increased linearly in the range of 0~0.6 N and saturated after 0.6 N. The variation rate of resistance is approximately 3%/N in the linear range. In addition, the flexibility of the sensing module is adequate to be placed on any curved surface like cylinder because the matrix consists of polymer and metal thin film. |
| doi_str_mv | 10.1109/ICSENS.2007.355575 |
| format | Conference Proceeding |
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The tactile sensor array is composed of 16 times 16 sensing elements with 2 mm times 2 mm cell size and its overall size is 4 cm times 5 cm. Both the tactile sensor array and interconnecter are placed in the sensing module during the fabrication process. The fabricated tactile sensing module is measured continuously in the normal force range of 0~1 N with tactile sensor evaluation system. The variation of resistance is relatively increased linearly in the range of 0~0.6 N and saturated after 0.6 N. The variation rate of resistance is approximately 3%/N in the linear range. 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The tactile sensor array is composed of 16 times 16 sensing elements with 2 mm times 2 mm cell size and its overall size is 4 cm times 5 cm. Both the tactile sensor array and interconnecter are placed in the sensing module during the fabrication process. The fabricated tactile sensing module is measured continuously in the normal force range of 0~1 N with tactile sensor evaluation system. The variation of resistance is relatively increased linearly in the range of 0~0.6 N and saturated after 0.6 N. The variation rate of resistance is approximately 3%/N in the linear range. In addition, the flexibility of the sensing module is adequate to be placed on any curved surface like cylinder because the matrix consists of polymer and metal thin film.</description><subject>Capacitive sensors</subject><subject>Electrical resistance measurement</subject><subject>Fabrication</subject><subject>Force measurement</subject><subject>Mechanical systems</subject><subject>Micromechanical devices</subject><subject>Polyimides</subject><subject>Polymer films</subject><subject>Sensor arrays</subject><subject>Tactile sensors</subject><issn>1930-0395</issn><issn>2168-9229</issn><isbn>1424403758</isbn><isbn>9781424403752</isbn><isbn>9781424403769</isbn><isbn>1424403766</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>2006</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><sourceid>RIE</sourceid><recordid>eNo1jF1PwjAYRutX4kD-gN70Dwz7ubaXhgCSgJoMr0nbvYOa0ZmtRPn3LlGvznlykgehe0qmlBLzuJqV85dyyghRUy6lVPICTYzSVDAhCFeFuUQZo4XODWPmCo3-g9TXKKOGk5xwI2_RqO8_CGFEMp2hw8K6LnibQhtxW-O3tjkfocud7aHCiwa-g2sAb61PYWAJsQ9xjzdtdRrmV0gHvIFkG1ymzoaIl_a0hx7bWOFVTND5Nkbwg9yhm9o2PUz-OEbvi_l29pyvX5er2dM6D1TJlJtaMkG18NYbZbQplKfWyUGqggojauGYAyplrbnRhdGKEC69d4XlVc0kH6OH398AALvPLhxtd94JqrRiiv8AxZpbog</recordid><startdate>200610</startdate><enddate>200610</enddate><creator>Kang Ryeol Lee</creator><creator>Kunnyun Kim</creator><creator>Yong-Kook Kim</creator><creator>Dae-Sung Lee</creator><creator>Won Hyo Kim</creator><creator>Nam-Kyu Cho</creator><creator>Kwang-Bum Park</creator><creator>Kyu-Sik Shin</creator><creator>Hyo-Derk Park</creator><general>IEEE</general><scope>6IE</scope><scope>6IH</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIO</scope></search><sort><creationdate>200610</creationdate><title>Fabrication of Polymer-based Flexible Tactile Sensing Module with Metal Strain Gauges and Interconnecter</title><author>Kang Ryeol Lee ; Kunnyun Kim ; Yong-Kook Kim ; Dae-Sung Lee ; Won Hyo Kim ; Nam-Kyu Cho ; Kwang-Bum Park ; Kyu-Sik Shin ; Hyo-Derk Park</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-i175t-9f524184cac9798967c1ab5896d61494f4b2be155f839869870035ccb6a3df253</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>2006</creationdate><topic>Capacitive sensors</topic><topic>Electrical resistance measurement</topic><topic>Fabrication</topic><topic>Force measurement</topic><topic>Mechanical systems</topic><topic>Micromechanical devices</topic><topic>Polyimides</topic><topic>Polymer films</topic><topic>Sensor arrays</topic><topic>Tactile sensors</topic><toplevel>online_resources</toplevel><creatorcontrib>Kang Ryeol Lee</creatorcontrib><creatorcontrib>Kunnyun Kim</creatorcontrib><creatorcontrib>Yong-Kook Kim</creatorcontrib><creatorcontrib>Dae-Sung Lee</creatorcontrib><creatorcontrib>Won Hyo Kim</creatorcontrib><creatorcontrib>Nam-Kyu Cho</creatorcontrib><creatorcontrib>Kwang-Bum Park</creatorcontrib><creatorcontrib>Kyu-Sik Shin</creatorcontrib><creatorcontrib>Hyo-Derk Park</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan (POP) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE Electronic Library (IEL)</collection><collection>IEEE Proceedings Order Plans (POP) 1998-present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Kang Ryeol Lee</au><au>Kunnyun Kim</au><au>Yong-Kook Kim</au><au>Dae-Sung Lee</au><au>Won Hyo Kim</au><au>Nam-Kyu Cho</au><au>Kwang-Bum Park</au><au>Kyu-Sik Shin</au><au>Hyo-Derk Park</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>Fabrication of Polymer-based Flexible Tactile Sensing Module with Metal Strain Gauges and Interconnecter</atitle><btitle>2006 5th IEEE Conference on Sensors</btitle><stitle>ICSENS</stitle><date>2006-10</date><risdate>2006</risdate><spage>742</spage><epage>745</epage><pages>742-745</pages><issn>1930-0395</issn><eissn>2168-9229</eissn><isbn>1424403758</isbn><isbn>9781424403752</isbn><eisbn>9781424403769</eisbn><eisbn>1424403766</eisbn><abstract>We present fabrication of flexible tactile sensing module with NiCr strain gauge as sensing element and interconnecter for signal treatment by polymer MEMS (micro electro mechanical system) technologies using polyimide materials. The tactile sensor array is composed of 16 times 16 sensing elements with 2 mm times 2 mm cell size and its overall size is 4 cm times 5 cm. Both the tactile sensor array and interconnecter are placed in the sensing module during the fabrication process. The fabricated tactile sensing module is measured continuously in the normal force range of 0~1 N with tactile sensor evaluation system. The variation of resistance is relatively increased linearly in the range of 0~0.6 N and saturated after 0.6 N. The variation rate of resistance is approximately 3%/N in the linear range. In addition, the flexibility of the sensing module is adequate to be placed on any curved surface like cylinder because the matrix consists of polymer and metal thin film.</abstract><pub>IEEE</pub><doi>10.1109/ICSENS.2007.355575</doi><tpages>4</tpages></addata></record> |
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| identifier | ISSN: 1930-0395 |
| ispartof | 2006 5th IEEE Conference on Sensors, 2006, p.742-745 |
| issn | 1930-0395 2168-9229 |
| language | eng |
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| source | IEEE Electronic Library (IEL) Conference Proceedings |
| subjects | Capacitive sensors Electrical resistance measurement Fabrication Force measurement Mechanical systems Micromechanical devices Polyimides Polymer films Sensor arrays Tactile sensors |
| title | Fabrication of Polymer-based Flexible Tactile Sensing Module with Metal Strain Gauges and Interconnecter |
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