Sensitive and Selective Photo Acoustic Gas Sensor Suitable for High Volume Manufacturing

Sensitive and selective gas measurements are crucial for a large variety of applications. This paper describes the manufacturing and characterisation of a photo acoustic gas sensor system. The system is based on a pressure sensor element with a sensitivity of 10 muV/V/Pa. 12 prototypes for measuring...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Schjolberg-Henriksen, K., Ferber, A., Moe, S., Wang, D.T., Bernstein, R.W., Rogne, H., Schulz, O., Muller, G., Lloyd, M., Suphan, K.-H.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Acoustic measurements Acoustic sensors Acoustic signal detection Gas detectors Pressure measurement Prototypes Pulp manufacturing Sensor phenomena and characterization Sensor systems Temperature sensors
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