Optimal Design and Implementation of 3D Shape Restoration System for Femtosecond Laser Micromachining

In this paper, we propose a 3D shape restoration system which measures height and surface of transparent ITO glass to compensate for focal length and incidence angle of laser beam to femtosecond laser micromachining. The proposed system is composed of line laser, high resolution camera, linear motio...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Jeonghong Park, Dongin Park, Seungki Cho, Jihong Lee, Yunho Ko, Youngwoo Park
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	3D shape restoration system Cameras femtosecond laser micromachining Glass Image restoration Indium tin oxide ITO glass Laser beams Length measurement Micromachining Optical design sensitivity Shape measurement Surface emitting lasers
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