P1M-2 Development of Miniature Ultrasonic Probe with PZT Film Deposited by Hydrothermal Method

Recently, the PZT poly-crystalline film deposited on titanium substrate by hydrothermal method has been studied actively for development of a small actuator and ultrasonic sensor in our laboratory. The PZT poly-crystalline films were deposited on a titanium substrate in KOH solution used as minerali...

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Bibliographische Detailangaben

Hauptverfasser:	Hasegawa, T., Kitsunai, H., Endo, A., Kawashima, N., Takeuchi, S., Ishikawa, M., Kurosawa, M.K.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Actuators Frequency synthesizers Laboratories Mineralization Probes Substrates Temperature sensors Titanium Ultrasonic imaging Zirconium
Online-Zugang:	Volltext bestellen
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