P1J-9 Aluminum-Nitride Manufacturing Solution for BAW and other MEMS Applications Using a Novel, High-Uniformity PVD Source

The growing number of Bulk Acoustic Wave (BAW) applications and the need to reduce the price per device drives equipment manufacturers to improve their related thin-film processes, lowering the cost of ownership of their tools by increasing overall device yield. In this paper, details of how the pie...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Lanz, R., Lambert, C., Senn, L., Gabathuler, L., Reynolds, G.J.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Acoustic waves Atherosclerosis Costs Film bulk acoustic resonators Manufacturing processes Micromechanical devices Piezoelectric films Resonator filters Sputtering Thin film devices
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