P1J-4 High-Q FBARs Using Epitaxial AlN Films

FBARs (Film Bulk Acoustic Resonators) are attractive candidates for RF filtering in radar phased array modules providing that their insertion loss can be reduced to 1 dB or less. One of the factors that contributes to the increased insertion loss of FBAR filters at X-band is the difficulty in achiev...

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Bibliographische Detailangaben

Hauptverfasser:	Krishnaswamy, S.V., Adam, J.D., Aumer, M.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Crystallization Fabrication Film bulk acoustic resonators Filtering Insertion loss Phased arrays Piezoelectric films Radio frequency Resonator filters Switching circuits
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