P1J-4 High-Q FBARs Using Epitaxial AlN Films

P1J-4 High-Q FBARs Using Epitaxial AlN Films

FBARs (Film Bulk Acoustic Resonators) are attractive candidates for RF filtering in radar phased array modules providing that their insertion loss can be reduced to 1 dB or less. One of the factors that contributes to the increased insertion loss of FBAR filters at X-band is the difficulty in achiev...

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Bibliographische Detailangaben
Hauptverfasser: Krishnaswamy, S.V., Adam, J.D., Aumer, M.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Crystallization
Fabrication
Film bulk acoustic resonators
Filtering
Insertion loss
Phased arrays
Piezoelectric films
Radio frequency
Resonator filters
Switching circuits
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Beschreibung
Zusammenfassung:FBARs (Film Bulk Acoustic Resonators) are attractive candidates for RF filtering in radar phased array modules providing that their insertion loss can be reduced to 1 dB or less. One of the factors that contributes to the increased insertion loss of FBAR filters at X-band is the difficulty in achieving high crystalline quality in thin (
ISSN:1051-0117
DOI:10.1109/ULTSYM.2006.369