Study on Micromachine Tools in Fabrication of Microparts

The development of Mechanical Micromanufacturing Technology-micromachine tools, as an alternative method for the fabrication of miniature products, is illustrated in this paper. Its advantages over MEMS and conventional large-scale ultraprecision machine tools is the ability to produce micro parts,...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Yingchun Liang, Yan Zhao, Qingshun Bai, Shumei Wang, Bo Wang, Mingjun Chen, Jianhua Dou
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Building materials Condition monitoring Fabrication Large-scale systems Machine tools Machining Manufacturing micromachine tool micromanufacturing Micromechanical devices micropart Shape Space technology
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