On-chip Digitally Tunable High Voltage Generator for Electrostatic Control of Micromechanical Devices
Micromechanical structures with capacitive readout provide a feasible alternative for feedback by utilizing electrostatic forces without any requirement for additional electrodes. For this purpose high voltages are often required. This paper presents circuit structures for on-chip high voltage gener...
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| creator | Aaltonen, L. Saukoski, M. Halonen, K. |
| description | Micromechanical structures with capacitive readout provide a feasible alternative for feedback by utilizing electrostatic forces without any requirement for additional electrodes. For this purpose high voltages are often required. This paper presents circuit structures for on-chip high voltage generation. A high voltage amplifier with digitally controllable output or a high voltage DAC is implemented and, as an example application, the DAC is used for quadrature compensation of a microelectro-mechanical gyroscope. The implemented high voltage generator achieves output voltages between zero and 27 V in 29 mV steps. The charge pump output voltage is limited in all cases to prevent reliability problems |
| doi_str_mv | 10.1109/CICC.2006.320825 |
| format | Conference Proceeding |
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For this purpose high voltages are often required. This paper presents circuit structures for on-chip high voltage generation. A high voltage amplifier with digitally controllable output or a high voltage DAC is implemented and, as an example application, the DAC is used for quadrature compensation of a microelectro-mechanical gyroscope. The implemented high voltage generator achieves output voltages between zero and 27 V in 29 mV steps. 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For this purpose high voltages are often required. This paper presents circuit structures for on-chip high voltage generation. A high voltage amplifier with digitally controllable output or a high voltage DAC is implemented and, as an example application, the DAC is used for quadrature compensation of a microelectro-mechanical gyroscope. The implemented high voltage generator achieves output voltages between zero and 27 V in 29 mV steps. The charge pump output voltage is limited in all cases to prevent reliability problems</description><subject>Charge pumps</subject><subject>Circuits</subject><subject>Clocks</subject><subject>Electrostatics</subject><subject>Force control</subject><subject>Gyroscopes</subject><subject>Medium voltage</subject><subject>Micromechanical devices</subject><subject>Switches</subject><subject>Voltage control</subject><issn>0886-5930</issn><issn>2152-3630</issn><isbn>1424400759</isbn><isbn>9781424400751</isbn><isbn>9781424400768</isbn><isbn>1424400767</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>2006</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><sourceid>RIE</sourceid><recordid>eNo1jM1qwkAYRad_ULXuC93MC8R-8z-zLNGqYHFju5XJ5EucMiaSpAXfvkLbxeVwOHAJeWQwYwzcc77O8xkH0DPBwXJ1RabOWCa5lABG22sy4kzxTGgBN2T8H5S7JSOwVmfKCbgn477_BGDOWT4iuG2ycIgnOo91HHxKZ7r7anyRkK5ifaAfbRp8jXSJDXZ-aDtaXbZIGIau7Qc_xEDztrlIom1F32Lo2iOGg29i8InO8TsG7B_IXeVTj9M_Tsj762KXr7LNdrnOXzZZ5JINmUVntdS8KDE4b4x0VhWOaS50yZ0IKhRKl1obK6CSFk2BldXWKihcCKYUE_L0-xsRcX_q4tF3571kTAE34gep4Fo6</recordid><startdate>200609</startdate><enddate>200609</enddate><creator>Aaltonen, L.</creator><creator>Saukoski, M.</creator><creator>Halonen, K.</creator><general>IEEE</general><scope>6IE</scope><scope>6IH</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIO</scope></search><sort><creationdate>200609</creationdate><title>On-chip Digitally Tunable High Voltage Generator for Electrostatic Control of Micromechanical Devices</title><author>Aaltonen, L. ; Saukoski, M. ; Halonen, K.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-i241t-8e986462bdec9a774985b916236d293c5cb56d667830f48e7bef868850b9cc7d3</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>2006</creationdate><topic>Charge pumps</topic><topic>Circuits</topic><topic>Clocks</topic><topic>Electrostatics</topic><topic>Force control</topic><topic>Gyroscopes</topic><topic>Medium voltage</topic><topic>Micromechanical devices</topic><topic>Switches</topic><topic>Voltage control</topic><toplevel>online_resources</toplevel><creatorcontrib>Aaltonen, L.</creatorcontrib><creatorcontrib>Saukoski, M.</creatorcontrib><creatorcontrib>Halonen, K.</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan (POP) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE Electronic Library (IEL)</collection><collection>IEEE Proceedings Order Plans (POP) 1998-present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Aaltonen, L.</au><au>Saukoski, M.</au><au>Halonen, K.</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>On-chip Digitally Tunable High Voltage Generator for Electrostatic Control of Micromechanical Devices</atitle><btitle>IEEE Custom Integrated Circuits Conference 2006</btitle><stitle>CICC</stitle><date>2006-09</date><risdate>2006</risdate><spage>583</spage><epage>586</epage><pages>583-586</pages><issn>0886-5930</issn><eissn>2152-3630</eissn><isbn>1424400759</isbn><isbn>9781424400751</isbn><eisbn>9781424400768</eisbn><eisbn>1424400767</eisbn><abstract>Micromechanical structures with capacitive readout provide a feasible alternative for feedback by utilizing electrostatic forces without any requirement for additional electrodes. For this purpose high voltages are often required. This paper presents circuit structures for on-chip high voltage generation. A high voltage amplifier with digitally controllable output or a high voltage DAC is implemented and, as an example application, the DAC is used for quadrature compensation of a microelectro-mechanical gyroscope. The implemented high voltage generator achieves output voltages between zero and 27 V in 29 mV steps. The charge pump output voltage is limited in all cases to prevent reliability problems</abstract><pub>IEEE</pub><doi>10.1109/CICC.2006.320825</doi><tpages>4</tpages></addata></record> |
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| language | eng |
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| source | IEEE Electronic Library (IEL) Conference Proceedings |
| subjects | Charge pumps Circuits Clocks Electrostatics Force control Gyroscopes Medium voltage Micromechanical devices Switches Voltage control |
| title | On-chip Digitally Tunable High Voltage Generator for Electrostatic Control of Micromechanical Devices |
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