Ge-catalyzed Vapour-Liquid-Solid growth of Carbon Nanotubes
The interest in carbon nanotubes (CNTs) for electronic applications is predominantly based on the outstanding properties of single walled CNTs, which include ballistic transport and high thermal conductivity. However, there is a need to avoid the standard metal catalysts used for CNT growth, which a...
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creator | Uchino, T. de Groot, C.H. Ashburn, P. Bourdakos, K.N. Smith, D.C. |
description | The interest in carbon nanotubes (CNTs) for electronic applications is predominantly based on the outstanding properties of single walled CNTs, which include ballistic transport and high thermal conductivity. However, there is a need to avoid the standard metal catalysts used for CNT growth, which act as "lifetime killers" for silicon devices. Here the authors present a Ge catalyst growth method of CNTs based on chemical vapour deposition of CNTs on SiGe and Ge dots on Si substrates. From Raman measurements, the grown CNTs are identified as single walled CNTs (SWNTs) with diameters ranging from 1.6 to 2.1 nm. Extensive scanning electron microscopy and atomic force microscopy characterisation of the effect of each stage in the growth process was presented. The authors believe that pre-growth stages lead to the formation of Ge nanoparticle seeds and propose a vapour-liquid-solid growth mechanism |
doi_str_mv | 10.1109/ESSDER.2006.307676 |
format | Conference Proceeding |
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The authors believe that pre-growth stages lead to the formation of Ge nanoparticle seeds and propose a vapour-liquid-solid growth mechanism</description><identifier>ISSN: 1930-8876</identifier><identifier>ISBN: 1424403014</identifier><identifier>ISBN: 9781424403011</identifier><identifier>DOI: 10.1109/ESSDER.2006.307676</identifier><language>eng</language><publisher>IEEE</publisher><subject>Atomic force microscopy ; Atomic layer deposition ; Ballistic transport ; Carbon nanotubes ; Chemical vapor deposition ; Germanium silicon alloys ; Scanning electron microscopy ; Silicon devices ; Silicon germanium ; Thermal conductivity</subject><ispartof>2006 European Solid-State Device Research Conference, 2006, p.214-217</ispartof><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/4099894$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>309,310,776,780,785,786,2052,27904,54898</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/4099894$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Uchino, T.</creatorcontrib><creatorcontrib>de Groot, C.H.</creatorcontrib><creatorcontrib>Ashburn, P.</creatorcontrib><creatorcontrib>Bourdakos, K.N.</creatorcontrib><creatorcontrib>Smith, D.C.</creatorcontrib><title>Ge-catalyzed Vapour-Liquid-Solid growth of Carbon Nanotubes</title><title>2006 European Solid-State Device Research Conference</title><addtitle>ESSDER</addtitle><description>The interest in carbon nanotubes (CNTs) for electronic applications is predominantly based on the outstanding properties of single walled CNTs, which include ballistic transport and high thermal conductivity. However, there is a need to avoid the standard metal catalysts used for CNT growth, which act as "lifetime killers" for silicon devices. Here the authors present a Ge catalyst growth method of CNTs based on chemical vapour deposition of CNTs on SiGe and Ge dots on Si substrates. From Raman measurements, the grown CNTs are identified as single walled CNTs (SWNTs) with diameters ranging from 1.6 to 2.1 nm. Extensive scanning electron microscopy and atomic force microscopy characterisation of the effect of each stage in the growth process was presented. The authors believe that pre-growth stages lead to the formation of Ge nanoparticle seeds and propose a vapour-liquid-solid growth mechanism</description><subject>Atomic force microscopy</subject><subject>Atomic layer deposition</subject><subject>Ballistic transport</subject><subject>Carbon nanotubes</subject><subject>Chemical vapor deposition</subject><subject>Germanium silicon alloys</subject><subject>Scanning electron microscopy</subject><subject>Silicon devices</subject><subject>Silicon germanium</subject><subject>Thermal conductivity</subject><issn>1930-8876</issn><isbn>1424403014</isbn><isbn>9781424403011</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>2006</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><sourceid>RIE</sourceid><recordid>eNotjs1KxDAURgMqOI7zArrpC6TeJDdpgiupnVEoClbdDmmTaqROxv4g49Nb0G9zNofDR8gFg5QxMFdFVd0WTykHUKmATGXqiJwx5IgggOExWTAjgGqdqVOyGoYPmIcSBaoFud542tjRdocf75JXu49TT8vwNQVHq9gFl7z18Xt8T2Kb5Lav4y55sLs4TrUfzslJa7vBr_65JC_r4jm_o-Xj5j6_KWngoEeqmZIArJaArTQWDErHObcIXgrRqkZ5741lSsta8Pk_59o5y7NWucarTCzJ5V83zOJ234dP2x-2CMZog-IXDzNG-A</recordid><startdate>200609</startdate><enddate>200609</enddate><creator>Uchino, T.</creator><creator>de Groot, C.H.</creator><creator>Ashburn, P.</creator><creator>Bourdakos, K.N.</creator><creator>Smith, D.C.</creator><general>IEEE</general><scope>6IE</scope><scope>6IL</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIL</scope></search><sort><creationdate>200609</creationdate><title>Ge-catalyzed Vapour-Liquid-Solid growth of Carbon Nanotubes</title><author>Uchino, T. ; de Groot, C.H. ; Ashburn, P. ; Bourdakos, K.N. ; Smith, D.C.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-i208t-8165001b504f59a0945d222a40e533f6c6eee9a1685b32767228dda27f6dce673</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>2006</creationdate><topic>Atomic force microscopy</topic><topic>Atomic layer deposition</topic><topic>Ballistic transport</topic><topic>Carbon nanotubes</topic><topic>Chemical vapor deposition</topic><topic>Germanium silicon alloys</topic><topic>Scanning electron microscopy</topic><topic>Silicon devices</topic><topic>Silicon germanium</topic><topic>Thermal conductivity</topic><toplevel>online_resources</toplevel><creatorcontrib>Uchino, T.</creatorcontrib><creatorcontrib>de Groot, C.H.</creatorcontrib><creatorcontrib>Ashburn, P.</creatorcontrib><creatorcontrib>Bourdakos, K.N.</creatorcontrib><creatorcontrib>Smith, D.C.</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan All Online (POP All Online) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE Electronic Library (IEL)</collection><collection>IEEE Proceedings Order Plans (POP All) 1998-Present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Uchino, T.</au><au>de Groot, C.H.</au><au>Ashburn, P.</au><au>Bourdakos, K.N.</au><au>Smith, D.C.</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>Ge-catalyzed Vapour-Liquid-Solid growth of Carbon Nanotubes</atitle><btitle>2006 European Solid-State Device Research Conference</btitle><stitle>ESSDER</stitle><date>2006-09</date><risdate>2006</risdate><spage>214</spage><epage>217</epage><pages>214-217</pages><issn>1930-8876</issn><isbn>1424403014</isbn><isbn>9781424403011</isbn><abstract>The interest in carbon nanotubes (CNTs) for electronic applications is predominantly based on the outstanding properties of single walled CNTs, which include ballistic transport and high thermal conductivity. However, there is a need to avoid the standard metal catalysts used for CNT growth, which act as "lifetime killers" for silicon devices. Here the authors present a Ge catalyst growth method of CNTs based on chemical vapour deposition of CNTs on SiGe and Ge dots on Si substrates. From Raman measurements, the grown CNTs are identified as single walled CNTs (SWNTs) with diameters ranging from 1.6 to 2.1 nm. Extensive scanning electron microscopy and atomic force microscopy characterisation of the effect of each stage in the growth process was presented. The authors believe that pre-growth stages lead to the formation of Ge nanoparticle seeds and propose a vapour-liquid-solid growth mechanism</abstract><pub>IEEE</pub><doi>10.1109/ESSDER.2006.307676</doi><tpages>4</tpages></addata></record> |
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ispartof | 2006 European Solid-State Device Research Conference, 2006, p.214-217 |
issn | 1930-8876 |
language | eng |
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source | IEEE Electronic Library (IEL) Conference Proceedings |
subjects | Atomic force microscopy Atomic layer deposition Ballistic transport Carbon nanotubes Chemical vapor deposition Germanium silicon alloys Scanning electron microscopy Silicon devices Silicon germanium Thermal conductivity |
title | Ge-catalyzed Vapour-Liquid-Solid growth of Carbon Nanotubes |
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