Design And Analysis Of A Capacitive Vibration-To-Electrical Energy Converter With Built-In Voltage

Design And Analysis Of A Capacitive Vibration-To-Electrical Energy Converter With Built-In Voltage

This paper reports on the design and analysis of a capacitive vibration-to-electrical energy converter. A theoretical design model of a parallel-plate electrostatic spring-mass-system is presented, based on state space equations. The charging of the parallel-plate capacitor takes place by utilizing...

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Hauptverfasser: Kuehne, I., Frey, A., Eckstein, G., Schmid, U., Seidel, H.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Capacitors
Electrodes
Electrostatics
Equations
Micromechanical devices
Numerical simulation
Power generation
Power system modeling
State-space methods
Voltage
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Eckstein, G.
Schmid, U.
Seidel, H.
description This paper reports on the design and analysis of a capacitive vibration-to-electrical energy converter. A theoretical design model of a parallel-plate electrostatic spring-mass-system is presented, based on state space equations. The charging of the parallel-plate capacitor takes place by utilizing materials with different work functions for the electrodes. Numerical simulations are performed in order to optimize design parameters targeting a maximum output power. Such a micro-electro-mechanical system (MEMS) based capacitive energy converter is able to provide an output power of 4.28 muW at an external vibration with a frequency of 1 kHz and an amplitude of 1.96 m/s 2 (0.2 g). This corresponds to a power density of 79.26 muW/cm 3 based on a typical MEMS die size
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subjects Capacitors
Electrodes
Electrostatics
Equations
Micromechanical devices
Numerical simulation
Power generation
Power system modeling
State-space methods
Voltage
title Design And Analysis Of A Capacitive Vibration-To-Electrical Energy Converter With Built-In Voltage
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