Integrated Readout and Control Electronics for a Microelectromechanical Angular Velocity Sensor

An ASIC is implemented for readout and control of a bulk micromachined capacitive gyroscope. Both the system architecture and details on the circuitry of different subsystems are presented. Together with digital signal processing on an FPGA chip, a complete working prototype of a microelectromechani...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Saukoski, Mikko, Aaltonen, Lasse, Halonen, Kari, Salo, Teemu
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Angular velocity Angular velocity control Application specific integrated circuits Circuit noise Digital signal processing chips Field programmable gate arrays Gyroscopes Prototypes Semiconductor device measurement Signal to noise ratio
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