Formation of Nano-Structures on ITO Antireflection Coating by Hydrogen Plasma Treatments
Recently, low dimensional semiconductor structures such as metallic nanoparticles, have attracted significant attention for photovoltaics. In this work we study the low-temperature formation of metallic nano-dots in an indium tin oxide (ITO) antireflection coating for solar cells after an appropriat...
Gespeichert in:
| Hauptverfasser: | , , , , , |
|---|---|
| Format: | Tagungsbericht |
| Sprache: | eng |
| Schlagworte: | |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | 137 |
|---|---|
| container_issue | |
| container_start_page | 134 |
| container_title | |
| container_volume | 1 |
| creator | Ulyashin, A.G. Maknys, K. Diplas, S. Olsen, A. Jorgensen, S. Svensson, B.G. |
| description | Recently, low dimensional semiconductor structures such as metallic nanoparticles, have attracted significant attention for photovoltaics. In this work we study the low-temperature formation of metallic nano-dots in an indium tin oxide (ITO) antireflection coating for solar cells after an appropriate hydrogen plasma treatment. Atomic force microscopy (AFM), scanning spreading resistance microscopy (SSRM), scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS) were used for the analysis of the morphology, electrical properties and composition of ITO layers deposited on Corning glass at different temperatures and subsequently subjected to hydrogen plasma. Formation of highly conductive nano-structures at hydrogenation temperatures below 250degC is observed. It is shown that the nano-structures formation can be controlled by the time and the temperature of the hydrogenation |
| doi_str_mv | 10.1109/WCPEC.2006.279382 |
| format | Conference Proceeding |
| fullrecord | <record><control><sourceid>ieee_6IE</sourceid><recordid>TN_cdi_ieee_primary_4059580</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><ieee_id>4059580</ieee_id><sourcerecordid>4059580</sourcerecordid><originalsourceid>FETCH-LOGICAL-i175t-b2d98f9a166d478deea4200d237ce06d34ae962a0d2841e0cadc21f4b0ecc4fa3</originalsourceid><addsrcrecordid>eNpFj91Kw0AUhFdUsK0-gHizL5B49qeb5LKE_kGxBSN6V053T0qkSWR3e9G3N6jg1ccMMwPD2KOAVAgont_L3bxMJYBJZVaoXF6xsdBSawCRiet_YdQNGw2AJFeZuGPjED4BJCgjRuxj0fsWY9N3vK_5C3Z98hr92cazp8AHd11t-ayLjaf6RPYnWPZDoTvyw4WvLs73R-r47oShRV55wthSF8M9u63xFOjhjxP2tphX5SrZbJfrcrZJGpFNY3KQrsjrAoUxTme5I0I9fHJSZZbAOKWRCiNxcHItCCw6K0WtD0DW6hrVhD397jZEtP_yTYv-stcwLaY5qG8VHVRg</addsrcrecordid><sourcetype>Publisher</sourcetype><iscdi>true</iscdi><recordtype>conference_proceeding</recordtype></control><display><type>conference_proceeding</type><title>Formation of Nano-Structures on ITO Antireflection Coating by Hydrogen Plasma Treatments</title><source>IEEE Electronic Library (IEL) Conference Proceedings</source><creator>Ulyashin, A.G. ; Maknys, K. ; Diplas, S. ; Olsen, A. ; Jorgensen, S. ; Svensson, B.G.</creator><creatorcontrib>Ulyashin, A.G. ; Maknys, K. ; Diplas, S. ; Olsen, A. ; Jorgensen, S. ; Svensson, B.G.</creatorcontrib><description>Recently, low dimensional semiconductor structures such as metallic nanoparticles, have attracted significant attention for photovoltaics. In this work we study the low-temperature formation of metallic nano-dots in an indium tin oxide (ITO) antireflection coating for solar cells after an appropriate hydrogen plasma treatment. Atomic force microscopy (AFM), scanning spreading resistance microscopy (SSRM), scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS) were used for the analysis of the morphology, electrical properties and composition of ITO layers deposited on Corning glass at different temperatures and subsequently subjected to hydrogen plasma. Formation of highly conductive nano-structures at hydrogenation temperatures below 250degC is observed. It is shown that the nano-structures formation can be controlled by the time and the temperature of the hydrogenation</description><identifier>ISSN: 0160-8371</identifier><identifier>ISBN: 1424400163</identifier><identifier>ISBN: 9781424400164</identifier><identifier>EISBN: 1424400171</identifier><identifier>EISBN: 9781424400171</identifier><identifier>DOI: 10.1109/WCPEC.2006.279382</identifier><language>eng</language><publisher>IEEE</publisher><subject>Atomic force microscopy ; Coatings ; Hydrogen ; Indium tin oxide ; Photoelectron microscopy ; Photovoltaic cells ; Plasma properties ; Plasma temperature ; Plasma x-ray sources ; Scanning electron microscopy</subject><ispartof>2006 IEEE 4th World Conference on Photovoltaic Energy Conference, 2006, Vol.1, p.134-137</ispartof><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/4059580$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>309,310,780,784,789,790,2056,27924,54919</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/4059580$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Ulyashin, A.G.</creatorcontrib><creatorcontrib>Maknys, K.</creatorcontrib><creatorcontrib>Diplas, S.</creatorcontrib><creatorcontrib>Olsen, A.</creatorcontrib><creatorcontrib>Jorgensen, S.</creatorcontrib><creatorcontrib>Svensson, B.G.</creatorcontrib><title>Formation of Nano-Structures on ITO Antireflection Coating by Hydrogen Plasma Treatments</title><title>2006 IEEE 4th World Conference on Photovoltaic Energy Conference</title><addtitle>WCPEC</addtitle><description>Recently, low dimensional semiconductor structures such as metallic nanoparticles, have attracted significant attention for photovoltaics. In this work we study the low-temperature formation of metallic nano-dots in an indium tin oxide (ITO) antireflection coating for solar cells after an appropriate hydrogen plasma treatment. Atomic force microscopy (AFM), scanning spreading resistance microscopy (SSRM), scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS) were used for the analysis of the morphology, electrical properties and composition of ITO layers deposited on Corning glass at different temperatures and subsequently subjected to hydrogen plasma. Formation of highly conductive nano-structures at hydrogenation temperatures below 250degC is observed. It is shown that the nano-structures formation can be controlled by the time and the temperature of the hydrogenation</description><subject>Atomic force microscopy</subject><subject>Coatings</subject><subject>Hydrogen</subject><subject>Indium tin oxide</subject><subject>Photoelectron microscopy</subject><subject>Photovoltaic cells</subject><subject>Plasma properties</subject><subject>Plasma temperature</subject><subject>Plasma x-ray sources</subject><subject>Scanning electron microscopy</subject><issn>0160-8371</issn><isbn>1424400163</isbn><isbn>9781424400164</isbn><isbn>1424400171</isbn><isbn>9781424400171</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>2006</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><sourceid>RIE</sourceid><recordid>eNpFj91Kw0AUhFdUsK0-gHizL5B49qeb5LKE_kGxBSN6V053T0qkSWR3e9G3N6jg1ccMMwPD2KOAVAgont_L3bxMJYBJZVaoXF6xsdBSawCRiet_YdQNGw2AJFeZuGPjED4BJCgjRuxj0fsWY9N3vK_5C3Z98hr92cazp8AHd11t-ayLjaf6RPYnWPZDoTvyw4WvLs73R-r47oShRV55wthSF8M9u63xFOjhjxP2tphX5SrZbJfrcrZJGpFNY3KQrsjrAoUxTme5I0I9fHJSZZbAOKWRCiNxcHItCCw6K0WtD0DW6hrVhD397jZEtP_yTYv-stcwLaY5qG8VHVRg</recordid><startdate>200605</startdate><enddate>200605</enddate><creator>Ulyashin, A.G.</creator><creator>Maknys, K.</creator><creator>Diplas, S.</creator><creator>Olsen, A.</creator><creator>Jorgensen, S.</creator><creator>Svensson, B.G.</creator><general>IEEE</general><scope>6IE</scope><scope>6IH</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIO</scope></search><sort><creationdate>200605</creationdate><title>Formation of Nano-Structures on ITO Antireflection Coating by Hydrogen Plasma Treatments</title><author>Ulyashin, A.G. ; Maknys, K. ; Diplas, S. ; Olsen, A. ; Jorgensen, S. ; Svensson, B.G.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-i175t-b2d98f9a166d478deea4200d237ce06d34ae962a0d2841e0cadc21f4b0ecc4fa3</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>2006</creationdate><topic>Atomic force microscopy</topic><topic>Coatings</topic><topic>Hydrogen</topic><topic>Indium tin oxide</topic><topic>Photoelectron microscopy</topic><topic>Photovoltaic cells</topic><topic>Plasma properties</topic><topic>Plasma temperature</topic><topic>Plasma x-ray sources</topic><topic>Scanning electron microscopy</topic><toplevel>online_resources</toplevel><creatorcontrib>Ulyashin, A.G.</creatorcontrib><creatorcontrib>Maknys, K.</creatorcontrib><creatorcontrib>Diplas, S.</creatorcontrib><creatorcontrib>Olsen, A.</creatorcontrib><creatorcontrib>Jorgensen, S.</creatorcontrib><creatorcontrib>Svensson, B.G.</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan (POP) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE Electronic Library (IEL)</collection><collection>IEEE Proceedings Order Plans (POP) 1998-present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Ulyashin, A.G.</au><au>Maknys, K.</au><au>Diplas, S.</au><au>Olsen, A.</au><au>Jorgensen, S.</au><au>Svensson, B.G.</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>Formation of Nano-Structures on ITO Antireflection Coating by Hydrogen Plasma Treatments</atitle><btitle>2006 IEEE 4th World Conference on Photovoltaic Energy Conference</btitle><stitle>WCPEC</stitle><date>2006-05</date><risdate>2006</risdate><volume>1</volume><spage>134</spage><epage>137</epage><pages>134-137</pages><issn>0160-8371</issn><isbn>1424400163</isbn><isbn>9781424400164</isbn><eisbn>1424400171</eisbn><eisbn>9781424400171</eisbn><abstract>Recently, low dimensional semiconductor structures such as metallic nanoparticles, have attracted significant attention for photovoltaics. In this work we study the low-temperature formation of metallic nano-dots in an indium tin oxide (ITO) antireflection coating for solar cells after an appropriate hydrogen plasma treatment. Atomic force microscopy (AFM), scanning spreading resistance microscopy (SSRM), scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS) were used for the analysis of the morphology, electrical properties and composition of ITO layers deposited on Corning glass at different temperatures and subsequently subjected to hydrogen plasma. Formation of highly conductive nano-structures at hydrogenation temperatures below 250degC is observed. It is shown that the nano-structures formation can be controlled by the time and the temperature of the hydrogenation</abstract><pub>IEEE</pub><doi>10.1109/WCPEC.2006.279382</doi><tpages>4</tpages></addata></record> |
| fulltext | fulltext_linktorsrc |
| identifier | ISSN: 0160-8371 |
| ispartof | 2006 IEEE 4th World Conference on Photovoltaic Energy Conference, 2006, Vol.1, p.134-137 |
| issn | 0160-8371 |
| language | eng |
| recordid | cdi_ieee_primary_4059580 |
| source | IEEE Electronic Library (IEL) Conference Proceedings |
| subjects | Atomic force microscopy Coatings Hydrogen Indium tin oxide Photoelectron microscopy Photovoltaic cells Plasma properties Plasma temperature Plasma x-ray sources Scanning electron microscopy |
| title | Formation of Nano-Structures on ITO Antireflection Coating by Hydrogen Plasma Treatments |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-12T00%3A27%3A09IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-ieee_6IE&rft_val_fmt=info:ofi/fmt:kev:mtx:book&rft.genre=proceeding&rft.atitle=Formation%20of%20Nano-Structures%20on%20ITO%20Antireflection%20Coating%20by%20Hydrogen%20Plasma%20Treatments&rft.btitle=2006%20IEEE%204th%20World%20Conference%20on%20Photovoltaic%20Energy%20Conference&rft.au=Ulyashin,%20A.G.&rft.date=2006-05&rft.volume=1&rft.spage=134&rft.epage=137&rft.pages=134-137&rft.issn=0160-8371&rft.isbn=1424400163&rft.isbn_list=9781424400164&rft_id=info:doi/10.1109/WCPEC.2006.279382&rft_dat=%3Cieee_6IE%3E4059580%3C/ieee_6IE%3E%3Curl%3E%3C/url%3E&rft.eisbn=1424400171&rft.eisbn_list=9781424400171&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rft_ieee_id=4059580&rfr_iscdi=true |