Assembly inside a Scanning Electron Microscope using Electron Beam induced Deposition

In this paper a new assembly process inside a scanning electron microscope (SEM) is demonstrated. The process includes the separation and handling of a silicon nanowire and its bonding to an atomic force microscope (AFM) probe using electron beam induced deposition (EBiD). EBiD is carried out by usi...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Wich, T., Sievers, T., Fatikow, S.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Assembly Atomic beams Atomic force microscopy Atomic layer deposition Bonding forces Chemical analysis EBiD Electron beams Force measurement image processing microassembly microrobots Scanning electron microscopy Silicon
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