A Plastic W-Band MEMS Tunable Filter
A plastic, W-band MEMS tunable filter has been successfully demonstrated by built-in deformable membranes. The filter has been fabricated using a MEMS-based process with plastic micro embossing process and gold electroplating. Two movable membranes of 1.6mm in diameter are designed as part of a two-...
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| creator | Firas Sammoura Liwei Lin |
| description | A plastic, W-band MEMS tunable filter has been successfully demonstrated by built-in deformable membranes. The filter has been fabricated using a MEMS-based process with plastic micro embossing process and gold electroplating. Two movable membranes of 1.6mm in diameter are designed as part of a two-cavity iris filter to actively change the cavity geometry for frequency tuning. Prototype filter has been fabricated and measured with bandwidth of 4.05GHz centered at 94.79GHz with a minimum insertion loss of 2.37dB and return loss better than 15dB. A total of 2.59GHz center frequency shift has been achieved when membranes deflect from -50mum to +150mum |
| doi_str_mv | 10.1109/MWSYM.2006.249413 |
| format | Conference Proceeding |
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The filter has been fabricated using a MEMS-based process with plastic micro embossing process and gold electroplating. Two movable membranes of 1.6mm in diameter are designed as part of a two-cavity iris filter to actively change the cavity geometry for frequency tuning. Prototype filter has been fabricated and measured with bandwidth of 4.05GHz centered at 94.79GHz with a minimum insertion loss of 2.37dB and return loss better than 15dB. A total of 2.59GHz center frequency shift has been achieved when membranes deflect from -50mum to +150mum</description><identifier>ISSN: 0149-645X</identifier><identifier>ISBN: 9780780395411</identifier><identifier>ISBN: 0780395417</identifier><identifier>DOI: 10.1109/MWSYM.2006.249413</identifier><language>eng</language><publisher>IEEE</publisher><subject>Bandpass filters ; Biomembranes ; Embossing ; Filters ; Frequency ; Geometry ; Gold ; Iris ; microelectromechanical devices ; Micromechanical devices ; millimeter wave waveguides ; Plastics ; tunable filters ; Tuning</subject><ispartof>2006 IEEE MTT-S International Microwave Symposium Digest, 2006, p.136-139</ispartof><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/4014840$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>309,310,780,784,789,790,2056,27924,54919</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/4014840$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Firas Sammoura</creatorcontrib><creatorcontrib>Liwei Lin</creatorcontrib><title>A Plastic W-Band MEMS Tunable Filter</title><title>2006 IEEE MTT-S International Microwave Symposium Digest</title><addtitle>MWSYM</addtitle><description>A plastic, W-band MEMS tunable filter has been successfully demonstrated by built-in deformable membranes. The filter has been fabricated using a MEMS-based process with plastic micro embossing process and gold electroplating. Two movable membranes of 1.6mm in diameter are designed as part of a two-cavity iris filter to actively change the cavity geometry for frequency tuning. Prototype filter has been fabricated and measured with bandwidth of 4.05GHz centered at 94.79GHz with a minimum insertion loss of 2.37dB and return loss better than 15dB. A total of 2.59GHz center frequency shift has been achieved when membranes deflect from -50mum to +150mum</description><subject>Bandpass filters</subject><subject>Biomembranes</subject><subject>Embossing</subject><subject>Filters</subject><subject>Frequency</subject><subject>Geometry</subject><subject>Gold</subject><subject>Iris</subject><subject>microelectromechanical devices</subject><subject>Micromechanical devices</subject><subject>millimeter wave waveguides</subject><subject>Plastics</subject><subject>tunable filters</subject><subject>Tuning</subject><issn>0149-645X</issn><isbn>9780780395411</isbn><isbn>0780395417</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>2006</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><sourceid>RIE</sourceid><recordid>eNotjk1LAzEUAAMqWGt_gHjJwWu2721evo61tCp0qdBK9VSymwQia5Hd9eC_74LCwNyGYewOoUAEN68Ou4-qKAF0UZIjlBds5oyFEekUIV6yCSA5oUm9X7Obvv8EAGVRT9jDgr-2vh9yww_i0Z8Cr1bVju9_Tr5uI1_ndojdLbtKvu3j7N9T9rZe7ZfPYrN9elkuNiKjUYNwdVmmZAl1DQZ8bHwTjJEuSHBBk4kuISqdxlPSEm0MHqSurQ2NlBRJTtn9XzfHGI_fXf7y3e-RxndLIM8n1j1e</recordid><startdate>200606</startdate><enddate>200606</enddate><creator>Firas Sammoura</creator><creator>Liwei Lin</creator><general>IEEE</general><scope>6IE</scope><scope>6IH</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIO</scope></search><sort><creationdate>200606</creationdate><title>A Plastic W-Band MEMS Tunable Filter</title><author>Firas Sammoura ; Liwei Lin</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-i175t-9b22ff8416b070aecacd7739d309d647e9f1156f20046318eda036b88dc334e43</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>2006</creationdate><topic>Bandpass filters</topic><topic>Biomembranes</topic><topic>Embossing</topic><topic>Filters</topic><topic>Frequency</topic><topic>Geometry</topic><topic>Gold</topic><topic>Iris</topic><topic>microelectromechanical devices</topic><topic>Micromechanical devices</topic><topic>millimeter wave waveguides</topic><topic>Plastics</topic><topic>tunable filters</topic><topic>Tuning</topic><toplevel>online_resources</toplevel><creatorcontrib>Firas Sammoura</creatorcontrib><creatorcontrib>Liwei Lin</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan (POP) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE Electronic Library (IEL)</collection><collection>IEEE Proceedings Order Plans (POP) 1998-present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Firas Sammoura</au><au>Liwei Lin</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>A Plastic W-Band MEMS Tunable Filter</atitle><btitle>2006 IEEE MTT-S International Microwave Symposium Digest</btitle><stitle>MWSYM</stitle><date>2006-06</date><risdate>2006</risdate><spage>136</spage><epage>139</epage><pages>136-139</pages><issn>0149-645X</issn><isbn>9780780395411</isbn><isbn>0780395417</isbn><abstract>A plastic, W-band MEMS tunable filter has been successfully demonstrated by built-in deformable membranes. The filter has been fabricated using a MEMS-based process with plastic micro embossing process and gold electroplating. Two movable membranes of 1.6mm in diameter are designed as part of a two-cavity iris filter to actively change the cavity geometry for frequency tuning. Prototype filter has been fabricated and measured with bandwidth of 4.05GHz centered at 94.79GHz with a minimum insertion loss of 2.37dB and return loss better than 15dB. A total of 2.59GHz center frequency shift has been achieved when membranes deflect from -50mum to +150mum</abstract><pub>IEEE</pub><doi>10.1109/MWSYM.2006.249413</doi><tpages>4</tpages></addata></record> |
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| identifier | ISSN: 0149-645X |
| ispartof | 2006 IEEE MTT-S International Microwave Symposium Digest, 2006, p.136-139 |
| issn | 0149-645X |
| language | eng |
| recordid | cdi_ieee_primary_4014840 |
| source | IEEE Electronic Library (IEL) Conference Proceedings |
| subjects | Bandpass filters Biomembranes Embossing Filters Frequency Geometry Gold Iris microelectromechanical devices Micromechanical devices millimeter wave waveguides Plastics tunable filters Tuning |
| title | A Plastic W-Band MEMS Tunable Filter |
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