A Plastic W-Band MEMS Tunable Filter

A Plastic W-Band MEMS Tunable Filter

A plastic, W-band MEMS tunable filter has been successfully demonstrated by built-in deformable membranes. The filter has been fabricated using a MEMS-based process with plastic micro embossing process and gold electroplating. Two movable membranes of 1.6mm in diameter are designed as part of a two-...

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Bibliographische Detailangaben
Hauptverfasser: Firas Sammoura, Liwei Lin
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Bandpass filters
Biomembranes
Embossing
Filters
Frequency
Geometry
Gold
Iris
microelectromechanical devices
Micromechanical devices
millimeter wave waveguides
Plastics
tunable filters
Tuning
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Beschreibung
Zusammenfassung:A plastic, W-band MEMS tunable filter has been successfully demonstrated by built-in deformable membranes. The filter has been fabricated using a MEMS-based process with plastic micro embossing process and gold electroplating. Two movable membranes of 1.6mm in diameter are designed as part of a two-cavity iris filter to actively change the cavity geometry for frequency tuning. Prototype filter has been fabricated and measured with bandwidth of 4.05GHz centered at 94.79GHz with a minimum insertion loss of 2.37dB and return loss better than 15dB. A total of 2.59GHz center frequency shift has been achieved when membranes deflect from -50mum to +150mum
ISSN:0149-645X
DOI:10.1109/MWSYM.2006.249413