Species, dose and energy dependence of implant induced transient enhanced diffusion

Special test structures which separate implant damage from a buried monitor boron layer were used to observe the transient diffusion associated with implant annealing. The large anomalous diffusion length is independent of implant species but strongly dependent on implant energy. This is modeled by...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Griffin, P.B., Lever, R.F., Huang, R.Y.S., Kennel, H.W., Packan, P.A., Plummer, J.D.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Boron Computational modeling Electrons Implants Monitoring Rapid thermal processing Simulated annealing Spontaneous emission Temperature Testing
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