Acoustic sensor technology
The recent development in monolithic devices has enabled a breakthrough in the applications of acoustic sensors in navigation and communications signal processing. A piezoelectric thin film material, such as ZnO, AlN or PZT, permits both acoustoelectric SAW and semiconductor electronic device compon...
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| creator | Motamedi, M.E. |
| description | The recent development in monolithic devices has enabled a breakthrough in the applications of acoustic sensors in navigation and communications signal processing. A piezoelectric thin film material, such as ZnO, AlN or PZT, permits both acoustoelectric SAW and semiconductor electronic device components to be fabricated on the same monolithic substrate. Here, we discuss acoustic sensor applications such as pressure, gas and vapor sensors and microaccelerometers. In general, micromachined sensors such as pressure sensors and accelerometers have made their way into autos for control and deployment of airbags, and silicon-based accelerometers and rate gyros eventually will find use in vehicle navigation systems. All these recent market demands are pulling development of acoustic sensor technologies. For low-cost volume production, new methods of acoustic sensing and processing of thin film piezoelectric materials are essential to the development of monolithic technology.< > |
| doi_str_mv | 10.1109/MWSYM.1994.335449 |
| format | Conference Proceeding |
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A piezoelectric thin film material, such as ZnO, AlN or PZT, permits both acoustoelectric SAW and semiconductor electronic device components to be fabricated on the same monolithic substrate. Here, we discuss acoustic sensor applications such as pressure, gas and vapor sensors and microaccelerometers. In general, micromachined sensors such as pressure sensors and accelerometers have made their way into autos for control and deployment of airbags, and silicon-based accelerometers and rate gyros eventually will find use in vehicle navigation systems. All these recent market demands are pulling development of acoustic sensor technologies. For low-cost volume production, new methods of acoustic sensing and processing of thin film piezoelectric materials are essential to the development of monolithic technology.< ></description><identifier>ISSN: 0149-645X</identifier><identifier>ISBN: 0780317785</identifier><identifier>ISBN: 9780780317789</identifier><identifier>EISSN: 2576-7216</identifier><identifier>DOI: 10.1109/MWSYM.1994.335449</identifier><language>eng</language><publisher>IEEE</publisher><subject>Accelerometers ; Acoustic materials ; Acoustic sensors ; Acoustic signal processing ; Navigation ; Piezoelectric films ; Piezoelectric materials ; Semiconductor materials ; Sensor systems ; Zinc oxide</subject><ispartof>1994 IEEE MTT-S International Microwave Symposium Digest (Cat. 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A piezoelectric thin film material, such as ZnO, AlN or PZT, permits both acoustoelectric SAW and semiconductor electronic device components to be fabricated on the same monolithic substrate. Here, we discuss acoustic sensor applications such as pressure, gas and vapor sensors and microaccelerometers. In general, micromachined sensors such as pressure sensors and accelerometers have made their way into autos for control and deployment of airbags, and silicon-based accelerometers and rate gyros eventually will find use in vehicle navigation systems. All these recent market demands are pulling development of acoustic sensor technologies. For low-cost volume production, new methods of acoustic sensing and processing of thin film piezoelectric materials are essential to the development of monolithic technology.< ></description><subject>Accelerometers</subject><subject>Acoustic materials</subject><subject>Acoustic sensors</subject><subject>Acoustic signal processing</subject><subject>Navigation</subject><subject>Piezoelectric films</subject><subject>Piezoelectric materials</subject><subject>Semiconductor materials</subject><subject>Sensor systems</subject><subject>Zinc oxide</subject><issn>0149-645X</issn><issn>2576-7216</issn><isbn>0780317785</isbn><isbn>9780780317789</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>1994</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><sourceid>RIE</sourceid><recordid>eNotz79OwzAQgHGLPxJp4QHo1BdIuLN953isKihIrRgAAVNlOxcIKg2Kw9C3ZyjTt_2kT6lrhAoR_M3m9el9U6H3tjKGrPUnqtDkuHQa-VRNwNVg0LmazlQBaH3Jlt4u1CTnLwCgGrlQs0Xqf_PYpXmWfe6H-Sjpc9_v-o_DpTpvwy7L1X-n6uXu9nl5X64fVw_Lxbrs0OmxbBsgSEZEk6VoY52SZmpiK5Fd46LWNXhmgug4YAopEEJgkpZBkhUzVbOj24nI9mfovsNw2B6XzB-kYj3F</recordid><startdate>1994</startdate><enddate>1994</enddate><creator>Motamedi, M.E.</creator><general>IEEE</general><scope>6IE</scope><scope>6IL</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIL</scope></search><sort><creationdate>1994</creationdate><title>Acoustic sensor technology</title><author>Motamedi, M.E.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-i172t-fd050c3ee2545b4b8cc265dbfeb67d7b228096650b76a1caca510a65ef60ec4e3</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>1994</creationdate><topic>Accelerometers</topic><topic>Acoustic materials</topic><topic>Acoustic sensors</topic><topic>Acoustic signal processing</topic><topic>Navigation</topic><topic>Piezoelectric films</topic><topic>Piezoelectric materials</topic><topic>Semiconductor materials</topic><topic>Sensor systems</topic><topic>Zinc oxide</topic><toplevel>online_resources</toplevel><creatorcontrib>Motamedi, M.E.</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan All Online (POP All Online) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE Electronic Library (IEL)</collection><collection>IEEE Proceedings Order Plans (POP All) 1998-Present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Motamedi, M.E.</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>Acoustic sensor technology</atitle><btitle>1994 IEEE MTT-S International Microwave Symposium Digest (Cat. No.94CH3389-4)</btitle><stitle>MWSYM</stitle><date>1994</date><risdate>1994</risdate><spage>521</spage><epage>524 vol.1</epage><pages>521-524 vol.1</pages><issn>0149-645X</issn><eissn>2576-7216</eissn><isbn>0780317785</isbn><isbn>9780780317789</isbn><abstract>The recent development in monolithic devices has enabled a breakthrough in the applications of acoustic sensors in navigation and communications signal processing. A piezoelectric thin film material, such as ZnO, AlN or PZT, permits both acoustoelectric SAW and semiconductor electronic device components to be fabricated on the same monolithic substrate. Here, we discuss acoustic sensor applications such as pressure, gas and vapor sensors and microaccelerometers. In general, micromachined sensors such as pressure sensors and accelerometers have made their way into autos for control and deployment of airbags, and silicon-based accelerometers and rate gyros eventually will find use in vehicle navigation systems. All these recent market demands are pulling development of acoustic sensor technologies. For low-cost volume production, new methods of acoustic sensing and processing of thin film piezoelectric materials are essential to the development of monolithic technology.< ></abstract><pub>IEEE</pub><doi>10.1109/MWSYM.1994.335449</doi></addata></record> |
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| identifier | ISSN: 0149-645X |
| ispartof | 1994 IEEE MTT-S International Microwave Symposium Digest (Cat. No.94CH3389-4), 1994, p.521-524 vol.1 |
| issn | 0149-645X 2576-7216 |
| language | eng |
| recordid | cdi_ieee_primary_335449 |
| source | IEEE Electronic Library (IEL) Conference Proceedings |
| subjects | Accelerometers Acoustic materials Acoustic sensors Acoustic signal processing Navigation Piezoelectric films Piezoelectric materials Semiconductor materials Sensor systems Zinc oxide |
| title | Acoustic sensor technology |
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