Theoretical modeling of microfabricated beams with elastically restrained supports
A mathematical model is developed to analyze the mechanical behavior of step-up supports which typically result from surface micromachining. This model accounts for the finite stiffness of the step-up support, which is more accurately represented by an elastically restrained boundary condition rathe...
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| Veröffentlicht in: | Journal of microelectromechanical systems 1993-09, Vol.2 (3), p.128-137 |
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| container_end_page | 137 |
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| container_title | Journal of microelectromechanical systems |
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| creator | Qingyuan Meng Mehregany, M. Mullen, R.L. |
| description | A mathematical model is developed to analyze the mechanical behavior of step-up supports which typically result from surface micromachining. This model accounts for the finite stiffness of the step-up support, which is more accurately represented by an elastically restrained boundary condition rather than a fixed or built-in boundary condition. Based on the model developed, the deflection of cantilever and doubly-supported beams under arbitrarily located concentrated and distributed loads is determined for a wide range of beam geometries. In addition, the buckling load of doubly-supported beams with elastically restrained boundary conditions is analyzed. Finite element analysis verifies the accuracy of the models developed. The models show that significant error in predicting the beam mechanical behavior may result if the finite stiffness of the step-up support is not correctly modeled.< > |
| doi_str_mv | 10.1109/84.260257 |
| format | Article |
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This model accounts for the finite stiffness of the step-up support, which is more accurately represented by an elastically restrained boundary condition rather than a fixed or built-in boundary condition. Based on the model developed, the deflection of cantilever and doubly-supported beams under arbitrarily located concentrated and distributed loads is determined for a wide range of beam geometries. In addition, the buckling load of doubly-supported beams with elastically restrained boundary conditions is analyzed. Finite element analysis verifies the accuracy of the models developed. The models show that significant error in predicting the beam mechanical behavior may result if the finite stiffness of the step-up support is not correctly modeled.< ></description><identifier>ISSN: 1057-7157</identifier><identifier>EISSN: 1941-0158</identifier><identifier>DOI: 10.1109/84.260257</identifier><identifier>CODEN: JMIYET</identifier><language>eng</language><publisher>New York, NY: IEEE</publisher><subject>Boundary conditions ; Error correction ; Exact sciences and technology ; Finite element methods ; Fundamental areas of phenomenology (including applications) ; Geometry ; Mathematical model ; Micromachining ; Micromechanical devices ; Physics ; Predictive models ; Solid mechanics ; Solid modeling ; Structural and continuum mechanics ; Structural beams</subject><ispartof>Journal of microelectromechanical systems, 1993-09, Vol.2 (3), p.128-137</ispartof><rights>1994 INIST-CNRS</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c221t-98315b4da18f5a579e9d312e0927a188d1259ae2ecf468dfb054566e15d583b83</citedby><cites>FETCH-LOGICAL-c221t-98315b4da18f5a579e9d312e0927a188d1259ae2ecf468dfb054566e15d583b83</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/260257$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>314,780,784,796,27923,27924,54757</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/260257$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=3931823$$DView record in Pascal Francis$$Hfree_for_read</backlink></links><search><creatorcontrib>Qingyuan Meng</creatorcontrib><creatorcontrib>Mehregany, M.</creatorcontrib><creatorcontrib>Mullen, R.L.</creatorcontrib><title>Theoretical modeling of microfabricated beams with elastically restrained supports</title><title>Journal of microelectromechanical systems</title><addtitle>JMEMS</addtitle><description>A mathematical model is developed to analyze the mechanical behavior of step-up supports which typically result from surface micromachining. This model accounts for the finite stiffness of the step-up support, which is more accurately represented by an elastically restrained boundary condition rather than a fixed or built-in boundary condition. Based on the model developed, the deflection of cantilever and doubly-supported beams under arbitrarily located concentrated and distributed loads is determined for a wide range of beam geometries. In addition, the buckling load of doubly-supported beams with elastically restrained boundary conditions is analyzed. Finite element analysis verifies the accuracy of the models developed. The models show that significant error in predicting the beam mechanical behavior may result if the finite stiffness of the step-up support is not correctly modeled.< ></description><subject>Boundary conditions</subject><subject>Error correction</subject><subject>Exact sciences and technology</subject><subject>Finite element methods</subject><subject>Fundamental areas of phenomenology (including applications)</subject><subject>Geometry</subject><subject>Mathematical model</subject><subject>Micromachining</subject><subject>Micromechanical devices</subject><subject>Physics</subject><subject>Predictive models</subject><subject>Solid mechanics</subject><subject>Solid modeling</subject><subject>Structural and continuum mechanics</subject><subject>Structural beams</subject><issn>1057-7157</issn><issn>1941-0158</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>1993</creationdate><recordtype>article</recordtype><recordid>eNo9kMtLAzEQxoMoWKsHr572IIKHrZk8dpOjlPqAgiD1vGR3JzayL5Mt0v_e6JaeZpjv933MDCHXQBcAVD8osWAZZTI_ITPQAlIKUp3Gnso8zUHm5-QihC9KQQiVzcj7Zou9x9FVpknavsbGdZ9Jb5PWVb63pvRRGbFOSjRtSH7cuE2wMeHf0OwTj2H0xnWRCLth6P0YLsmZNU3Aq0Odk4-n1Wb5kq7fnl-Xj-u0YgzGVCsOshS1AWWlkblGXXNgSDXL40zVwKQ2yLCyIlO1LakUMssQZC0VLxWfk7spd_D99y7uUbQuVNg0psN-FwqmMsU0FxG8n8B4UQgebTF41xq_L4AWf18rlCimr0X29hBqQrzQetNVLhwNXHNQjEfsZsIcIh7VQ8Yv9fR0rw</recordid><startdate>19930901</startdate><enddate>19930901</enddate><creator>Qingyuan Meng</creator><creator>Mehregany, M.</creator><creator>Mullen, R.L.</creator><general>IEEE</general><general>Institute of Electrical and Electronics Engineers</general><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>7TB</scope><scope>7U5</scope><scope>8FD</scope><scope>FR3</scope><scope>L7M</scope></search><sort><creationdate>19930901</creationdate><title>Theoretical modeling of microfabricated beams with elastically restrained supports</title><author>Qingyuan Meng ; Mehregany, M. ; Mullen, R.L.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c221t-98315b4da18f5a579e9d312e0927a188d1259ae2ecf468dfb054566e15d583b83</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>1993</creationdate><topic>Boundary conditions</topic><topic>Error correction</topic><topic>Exact sciences and technology</topic><topic>Finite element methods</topic><topic>Fundamental areas of phenomenology (including applications)</topic><topic>Geometry</topic><topic>Mathematical model</topic><topic>Micromachining</topic><topic>Micromechanical devices</topic><topic>Physics</topic><topic>Predictive models</topic><topic>Solid mechanics</topic><topic>Solid modeling</topic><topic>Structural and continuum mechanics</topic><topic>Structural beams</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Qingyuan Meng</creatorcontrib><creatorcontrib>Mehregany, M.</creatorcontrib><creatorcontrib>Mullen, R.L.</creatorcontrib><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Electronics & Communications Abstracts</collection><collection>Mechanical & Transportation Engineering Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Engineering Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Journal of microelectromechanical systems</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Qingyuan Meng</au><au>Mehregany, M.</au><au>Mullen, R.L.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Theoretical modeling of microfabricated beams with elastically restrained supports</atitle><jtitle>Journal of microelectromechanical systems</jtitle><stitle>JMEMS</stitle><date>1993-09-01</date><risdate>1993</risdate><volume>2</volume><issue>3</issue><spage>128</spage><epage>137</epage><pages>128-137</pages><issn>1057-7157</issn><eissn>1941-0158</eissn><coden>JMIYET</coden><abstract>A mathematical model is developed to analyze the mechanical behavior of step-up supports which typically result from surface micromachining. This model accounts for the finite stiffness of the step-up support, which is more accurately represented by an elastically restrained boundary condition rather than a fixed or built-in boundary condition. Based on the model developed, the deflection of cantilever and doubly-supported beams under arbitrarily located concentrated and distributed loads is determined for a wide range of beam geometries. In addition, the buckling load of doubly-supported beams with elastically restrained boundary conditions is analyzed. Finite element analysis verifies the accuracy of the models developed. The models show that significant error in predicting the beam mechanical behavior may result if the finite stiffness of the step-up support is not correctly modeled.< ></abstract><cop>New York, NY</cop><pub>IEEE</pub><doi>10.1109/84.260257</doi><tpages>10</tpages></addata></record> |
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| identifier | ISSN: 1057-7157 |
| ispartof | Journal of microelectromechanical systems, 1993-09, Vol.2 (3), p.128-137 |
| issn | 1057-7157 1941-0158 |
| language | eng |
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| source | IEEE Electronic Library (IEL) |
| subjects | Boundary conditions Error correction Exact sciences and technology Finite element methods Fundamental areas of phenomenology (including applications) Geometry Mathematical model Micromachining Micromechanical devices Physics Predictive models Solid mechanics Solid modeling Structural and continuum mechanics Structural beams |
| title | Theoretical modeling of microfabricated beams with elastically restrained supports |
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