An electrostatic microresonant power conversion device

An electrostatically driven microstructure suitable for use in a monolithic resonant DC-DC converter is presented. The device can be manufactured using existing integrated circuit processing techniques, permitting integration with, switching devices in silicon. The mechanical resonant structure is u...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Noworolski, J.M., Sanders, S.R.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	DC-DC power converters Electrostatics Integrated circuit manufacture Integrated circuit technology Magnetic resonance Manufacturing processes Microstructure Power conversion Silicon Switching circuits
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