A superprecision measuring method and the corresponding measuring system for error movement of instrument spindles

The authors analyze the principal defect in the multi-step method, the traditional error separating method for error movement of instrument spindles, and present a novel error separating method, the combined multi-step method. Using the novel technique, one can get rid of the 'blind spectrum' which is unavoidable when using the former method. The measuring times using the new method and those using the traditional one are generally the same. Based on the combined multi-step method, a measuring and controlling system for separating the error movement of instrument spindles has been established.< >