Development of design rules for reliable tungsten plugs using simulations
Design rules for the fabrication of reliable tungsten via plugs, produced using blanket tungsten deposition and etch-back, have been developed using experimental results and computer simulations. Fast computer simulations have been used to define the design rules for this process. The use of compute...
Gespeichert in:
| Hauptverfasser: | , , , , , , |
|---|---|
| Format: | Tagungsbericht |
| Sprache: | eng |
| Schlagworte: | |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | 10 |
|---|---|
| container_issue | |
| container_start_page | 8 |
| container_title | |
| container_volume | |
| creator | IslamRaja, M.M. Bariya, A.J. Saraswat, K.C. Cappelli, M.A. McVittie, J.P. Moberly, L. Lahri, R. |
| description | Design rules for the fabrication of reliable tungsten via plugs, produced using blanket tungsten deposition and etch-back, have been developed using experimental results and computer simulations. Fast computer simulations have been used to define the design rules for this process. The use of computer simulations greatly reduces the number of experiments required to develop a process or to establish design rules. The design rules ensure that the via plugs are void free and that they do not form a severe topography during the etch-back.< > |
| doi_str_mv | 10.1109/RELPHY.1992.187614 |
| format | Conference Proceeding |
| fullrecord | <record><control><sourceid>ieee_6IE</sourceid><recordid>TN_cdi_ieee_primary_187614</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><ieee_id>187614</ieee_id><sourcerecordid>187614</sourcerecordid><originalsourceid>FETCH-LOGICAL-i172t-26ea2ab5459ce59d71e55401f72fd4a4e163a1d0b1d71b4765817b77055b789b3</originalsourceid><addsrcrecordid>eNotj8FKxDAURQMiKGN_YFb5gda8NulrljKOzkBBEWcxqyGxryWSpqVpBf_ewni5cBYXDlzGtiAyAKEfP_b1--GcgdZ5BhWWIG9YorESawshsZB3LInxW6yRCkqEe3Z8ph_yw9hTmPnQ8oai6wKfFk-Rt8PEJ_LOWE98XkIXZwp89EsX-RJd6Hh0_eLN7IYQH9hta3yk5J8bdnrZf-4Oaf32etw91akDzOc0L8nkxiqp9Bcp3SCQUlJAi3nbSCMJysJAIyysk5VYqgrQIgqlLFbaFhu2vXodEV3GyfVm-r1c_xZ_M8RMGw</addsrcrecordid><sourcetype>Publisher</sourcetype><iscdi>true</iscdi><recordtype>conference_proceeding</recordtype></control><display><type>conference_proceeding</type><title>Development of design rules for reliable tungsten plugs using simulations</title><source>IEEE Electronic Library (IEL) Conference Proceedings</source><creator>IslamRaja, M.M. ; Bariya, A.J. ; Saraswat, K.C. ; Cappelli, M.A. ; McVittie, J.P. ; Moberly, L. ; Lahri, R.</creator><creatorcontrib>IslamRaja, M.M. ; Bariya, A.J. ; Saraswat, K.C. ; Cappelli, M.A. ; McVittie, J.P. ; Moberly, L. ; Lahri, R.</creatorcontrib><description>Design rules for the fabrication of reliable tungsten via plugs, produced using blanket tungsten deposition and etch-back, have been developed using experimental results and computer simulations. Fast computer simulations have been used to define the design rules for this process. The use of computer simulations greatly reduces the number of experiments required to develop a process or to establish design rules. The design rules ensure that the via plugs are void free and that they do not form a severe topography during the etch-back.< ></description><identifier>ISBN: 9780780304734</identifier><identifier>ISBN: 078030473X</identifier><identifier>DOI: 10.1109/RELPHY.1992.187614</identifier><language>eng</language><publisher>IEEE</publisher><subject>CMOS technology ; Computational modeling ; Computer simulation ; Dielectric losses ; Etching ; Fabrication ; Mechanical engineering ; Plugs ; Surfaces ; Tungsten</subject><ispartof>30th Annual Proceedings Reliability Physics 1992, 1992, p.8-10</ispartof><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/187614$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>309,310,780,784,789,790,2056,4048,4049,27924,54919</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/187614$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>IslamRaja, M.M.</creatorcontrib><creatorcontrib>Bariya, A.J.</creatorcontrib><creatorcontrib>Saraswat, K.C.</creatorcontrib><creatorcontrib>Cappelli, M.A.</creatorcontrib><creatorcontrib>McVittie, J.P.</creatorcontrib><creatorcontrib>Moberly, L.</creatorcontrib><creatorcontrib>Lahri, R.</creatorcontrib><title>Development of design rules for reliable tungsten plugs using simulations</title><title>30th Annual Proceedings Reliability Physics 1992</title><addtitle>RELPHY</addtitle><description>Design rules for the fabrication of reliable tungsten via plugs, produced using blanket tungsten deposition and etch-back, have been developed using experimental results and computer simulations. Fast computer simulations have been used to define the design rules for this process. The use of computer simulations greatly reduces the number of experiments required to develop a process or to establish design rules. The design rules ensure that the via plugs are void free and that they do not form a severe topography during the etch-back.< ></description><subject>CMOS technology</subject><subject>Computational modeling</subject><subject>Computer simulation</subject><subject>Dielectric losses</subject><subject>Etching</subject><subject>Fabrication</subject><subject>Mechanical engineering</subject><subject>Plugs</subject><subject>Surfaces</subject><subject>Tungsten</subject><isbn>9780780304734</isbn><isbn>078030473X</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>1992</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><sourceid>RIE</sourceid><recordid>eNotj8FKxDAURQMiKGN_YFb5gda8NulrljKOzkBBEWcxqyGxryWSpqVpBf_ewni5cBYXDlzGtiAyAKEfP_b1--GcgdZ5BhWWIG9YorESawshsZB3LInxW6yRCkqEe3Z8ph_yw9hTmPnQ8oai6wKfFk-Rt8PEJ_LOWE98XkIXZwp89EsX-RJd6Hh0_eLN7IYQH9hta3yk5J8bdnrZf-4Oaf32etw91akDzOc0L8nkxiqp9Bcp3SCQUlJAi3nbSCMJysJAIyysk5VYqgrQIgqlLFbaFhu2vXodEV3GyfVm-r1c_xZ_M8RMGw</recordid><startdate>1992</startdate><enddate>1992</enddate><creator>IslamRaja, M.M.</creator><creator>Bariya, A.J.</creator><creator>Saraswat, K.C.</creator><creator>Cappelli, M.A.</creator><creator>McVittie, J.P.</creator><creator>Moberly, L.</creator><creator>Lahri, R.</creator><general>IEEE</general><scope>6IE</scope><scope>6IL</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIL</scope></search><sort><creationdate>1992</creationdate><title>Development of design rules for reliable tungsten plugs using simulations</title><author>IslamRaja, M.M. ; Bariya, A.J. ; Saraswat, K.C. ; Cappelli, M.A. ; McVittie, J.P. ; Moberly, L. ; Lahri, R.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-i172t-26ea2ab5459ce59d71e55401f72fd4a4e163a1d0b1d71b4765817b77055b789b3</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>1992</creationdate><topic>CMOS technology</topic><topic>Computational modeling</topic><topic>Computer simulation</topic><topic>Dielectric losses</topic><topic>Etching</topic><topic>Fabrication</topic><topic>Mechanical engineering</topic><topic>Plugs</topic><topic>Surfaces</topic><topic>Tungsten</topic><toplevel>online_resources</toplevel><creatorcontrib>IslamRaja, M.M.</creatorcontrib><creatorcontrib>Bariya, A.J.</creatorcontrib><creatorcontrib>Saraswat, K.C.</creatorcontrib><creatorcontrib>Cappelli, M.A.</creatorcontrib><creatorcontrib>McVittie, J.P.</creatorcontrib><creatorcontrib>Moberly, L.</creatorcontrib><creatorcontrib>Lahri, R.</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan All Online (POP All Online) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE Electronic Library (IEL)</collection><collection>IEEE Proceedings Order Plans (POP All) 1998-Present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>IslamRaja, M.M.</au><au>Bariya, A.J.</au><au>Saraswat, K.C.</au><au>Cappelli, M.A.</au><au>McVittie, J.P.</au><au>Moberly, L.</au><au>Lahri, R.</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>Development of design rules for reliable tungsten plugs using simulations</atitle><btitle>30th Annual Proceedings Reliability Physics 1992</btitle><stitle>RELPHY</stitle><date>1992</date><risdate>1992</risdate><spage>8</spage><epage>10</epage><pages>8-10</pages><isbn>9780780304734</isbn><isbn>078030473X</isbn><abstract>Design rules for the fabrication of reliable tungsten via plugs, produced using blanket tungsten deposition and etch-back, have been developed using experimental results and computer simulations. Fast computer simulations have been used to define the design rules for this process. The use of computer simulations greatly reduces the number of experiments required to develop a process or to establish design rules. The design rules ensure that the via plugs are void free and that they do not form a severe topography during the etch-back.< ></abstract><pub>IEEE</pub><doi>10.1109/RELPHY.1992.187614</doi><tpages>3</tpages></addata></record> |
| fulltext | fulltext_linktorsrc |
| identifier | ISBN: 9780780304734 |
| ispartof | 30th Annual Proceedings Reliability Physics 1992, 1992, p.8-10 |
| issn | |
| language | eng |
| recordid | cdi_ieee_primary_187614 |
| source | IEEE Electronic Library (IEL) Conference Proceedings |
| subjects | CMOS technology Computational modeling Computer simulation Dielectric losses Etching Fabrication Mechanical engineering Plugs Surfaces Tungsten |
| title | Development of design rules for reliable tungsten plugs using simulations |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-13T05%3A27%3A40IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-ieee_6IE&rft_val_fmt=info:ofi/fmt:kev:mtx:book&rft.genre=proceeding&rft.atitle=Development%20of%20design%20rules%20for%20reliable%20tungsten%20plugs%20using%20simulations&rft.btitle=30th%20Annual%20Proceedings%20Reliability%20Physics%201992&rft.au=IslamRaja,%20M.M.&rft.date=1992&rft.spage=8&rft.epage=10&rft.pages=8-10&rft.isbn=9780780304734&rft.isbn_list=078030473X&rft_id=info:doi/10.1109/RELPHY.1992.187614&rft_dat=%3Cieee_6IE%3E187614%3C/ieee_6IE%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rft_ieee_id=187614&rfr_iscdi=true |