High-speed, low-voltage complementary heterostructure FET circuit technology

A III-V complementary heterostructure FET circuit technology which offers high-speed at low supply voltages has been demonstrated. This circuit technology is based on the vertical integration of p-channel quantum-well FETs with n-channel FETs fabricated in the underlying layers of a single-growth Al...

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Hauptverfasser: Kiehl, R.A., Yates, J., Palmateer, L.F., Wright, S.L., Frank, D.J., Jackson, T.N., Degelormo, J.F., Fleischman, A.J.
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creator Kiehl, R.A.
Yates, J.
Palmateer, L.F.
Wright, S.L.
Frank, D.J.
Jackson, T.N.
Degelormo, J.F.
Fleischman, A.J.
description A III-V complementary heterostructure FET circuit technology which offers high-speed at low supply voltages has been demonstrated. This circuit technology is based on the vertical integration of p-channel quantum-well FETs with n-channel FETs fabricated in the underlying layers of a single-growth AlGaAs-GaAs structure. Key features of the p-FET heterostructure design and fabrication technology are discussed, and results on the electrical characteristics and the performance of high-speed ring oscillator circuits are presented. Delays of 144 and 59 ps are obtained in 0.8 and 0.5 mu m gate-length circuits at a 1.25 V supply, which are the fastest speeds yet reported for room-temperature complementary heterostructure FET circuits at low supply voltages.< >
doi_str_mv 10.1109/GAAS.1991.172644
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identifier ISBN: 9780780301962
ispartof [1991] GaAs IC Symposium Technical Digest, 1991, p.101-104
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source IEEE Electronic Library (IEL) Conference Proceedings
subjects Annealing
Circuit testing
Doping
Epitaxial growth
Fabrication
FET circuits
Gallium arsenide
Impurities
Integrated circuit technology
Transconductance
title High-speed, low-voltage complementary heterostructure FET circuit technology
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