Theoretical and numerical modeling of a CMOS micromachined acoustic sensor

In this paper, we present theoretical and numerical modeling done on a new structure of CMOS micromachined inductive microphone. Its mode of operation is based on the variation of the mutual inductance between an external fixed inductor and an internal suspended inductor. This internal inductor is d...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Mezghani, B., Haboura, K., Tounsi, F., Smaoui, S., El-Borgi, S., Choura, S., Masmoudi, M.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Acoustic beams Acoustic sensors Biomembranes Frequency Inductance Inductors Mechanical sensors Microphones Numerical models Semiconductor device modeling
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