Out-of-Plane Knife-Gate Microvalves for Controlling Large Gas Flows

This paper considers design issues for microvalves for large gas flow control. It introduces out-of-plane knife-gate microvalves as a novel design concept and a proportional microvalve concept for pressure control applications. The design of three different actuator-gate configurations and first pro...

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Veröffentlicht in:	Journal of microelectromechanical systems 2006-10, Vol.15 (5), p.1281-1288
Hauptverfasser:	Haasl, S., Braun, S., Ridgeway, A.S., Sadoon, S., van der Wijngaart, W., Stemme, G.
Format:	Artikel
Sprache:	eng
Schlagworte:	Actuators Applied fluid mechanics Applied sciences Bimorphs Chips Costs Design engineering Engineering Exact sciences and technology Fluid dynamics Fluid flow Fluidics Fundamental areas of phenomenology (including applications) Gas flow Instruments, apparatus, components and techniques common to several branches of physics and astronomy Laboratories Mechanical Mechanical engineering. Machine design Mechanical instruments, equipment and techniques Microfluidics Micromechanical devices and systems micropneumatics Microvalves Orifices Packaging Physics Precision engineering, watch making Pressure control Prototypes Valves
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