Out-of-Plane Knife-Gate Microvalves for Controlling Large Gas Flows
This paper considers design issues for microvalves for large gas flow control. It introduces out-of-plane knife-gate microvalves as a novel design concept and a proportional microvalve concept for pressure control applications. The design of three different actuator-gate configurations and first pro...
Gespeichert in:
| Veröffentlicht in: | Journal of microelectromechanical systems 2006-10, Vol.15 (5), p.1281-1288 |
|---|---|
| Hauptverfasser: | , , , , , |
| Format: | Artikel |
| Sprache: | eng |
| Schlagworte: | |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | 1288 |
|---|---|
| container_issue | 5 |
| container_start_page | 1281 |
| container_title | Journal of microelectromechanical systems |
| container_volume | 15 |
| creator | Haasl, S. Braun, S. Ridgeway, A.S. Sadoon, S. van der Wijngaart, W. Stemme, G. |
| description | This paper considers design issues for microvalves for large gas flow control. It introduces out-of-plane knife-gate microvalves as a novel design concept and a proportional microvalve concept for pressure control applications. The design of three different actuator-gate configurations and first prototypes are presented. The first valve prototypes feature thermal silicon-aluminum bimorph actuators and the pressure-flow performance per chip area of the demonstrator valve presented is greatly increased using out-of-plane actuation and an out-of-plane orifice. The characterization of the actuators and of the pressure-flow performance is presented. The prototype valve allows for a flow change of DeltaQ= 3.4 standard liters per minute (SLPM) at a pressure change of DeltaP= 95 kPa (P in = 196.3 kPa, P out = 101.3 kPa) on an active chip area of only 2.3times3.7 mm 2 1515 |
| doi_str_mv | 10.1109/JMEMS.2006.880279 |
| format | Article |
| fullrecord | <record><control><sourceid>proquest_RIE</sourceid><recordid>TN_cdi_ieee_primary_1707789</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><ieee_id>1707789</ieee_id><sourcerecordid>2544581531</sourcerecordid><originalsourceid>FETCH-LOGICAL-c434t-5b2c44be0fee1f366dc2af07b1f710ad1dc9b424a6e7985beca11aea08f37fed3</originalsourceid><addsrcrecordid>eNpd0U1v1DAQBuAIgUQp_ADEJUJCvTRbj-PE9rFa2uVjV0Xi42pNvOPFJY0XO2nFv8dLKir1ZEt-ZqyZtyheA1sAMH32aXOx-brgjLULpRiX-klxBFpAxaBRT_OdNbKS0MjnxYuUrhkDIVR7VCyvprEKrvrS40Dl58E7qlY4UrnxNoZb7G8plS7EchmGMYa-98OuXGPcUbnCVF724S69LJ457BO9uj-Pi--XF9-WH6r11erj8nxdWVGLsWo6boXoiDkicHXbbi1Hx2QHTgLDLWyt7gQX2JLUqunIIgASMuVq6WhbHxenc990R_upM_vobzD-MQG9ee9_nJsQd-bX-NMAKC4zP5n5PobfE6XR3PhkqT9MGqZkNJO6bWvFs3z7SF6HKQ55FqOBc6Z422QEM8p7SSmS-_8_MHPIwPzLwBwyMHMGuebdfWNMFnsXcbA-PRQq0FnV2b2ZnSeih2fJpFS6_gvz-I9w</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>912208265</pqid></control><display><type>article</type><title>Out-of-Plane Knife-Gate Microvalves for Controlling Large Gas Flows</title><source>IEEE Electronic Library (IEL)</source><creator>Haasl, S. ; Braun, S. ; Ridgeway, A.S. ; Sadoon, S. ; van der Wijngaart, W. ; Stemme, G.</creator><creatorcontrib>Haasl, S. ; Braun, S. ; Ridgeway, A.S. ; Sadoon, S. ; van der Wijngaart, W. ; Stemme, G.</creatorcontrib><description>This paper considers design issues for microvalves for large gas flow control. It introduces out-of-plane knife-gate microvalves as a novel design concept and a proportional microvalve concept for pressure control applications. The design of three different actuator-gate configurations and first prototypes are presented. The first valve prototypes feature thermal silicon-aluminum bimorph actuators and the pressure-flow performance per chip area of the demonstrator valve presented is greatly increased using out-of-plane actuation and an out-of-plane orifice. The characterization of the actuators and of the pressure-flow performance is presented. The prototype valve allows for a flow change of DeltaQ= 3.4 standard liters per minute (SLPM) at a pressure change of DeltaP= 95 kPa (P in = 196.3 kPa, P out = 101.3 kPa) on an active chip area of only 2.3times3.7 mm 2 1515</description><identifier>ISSN: 1057-7157</identifier><identifier>ISSN: 1941-0158</identifier><identifier>EISSN: 1941-0158</identifier><identifier>DOI: 10.1109/JMEMS.2006.880279</identifier><identifier>CODEN: JMIYET</identifier><language>eng</language><publisher>New York, NY: IEEE</publisher><subject>Actuators ; Applied fluid mechanics ; Applied sciences ; Bimorphs ; Chips ; Costs ; Design engineering ; Engineering ; Exact sciences and technology ; Fluid dynamics ; Fluid flow ; Fluidics ; Fundamental areas of phenomenology (including applications) ; Gas flow ; Instruments, apparatus, components and techniques common to several branches of physics and astronomy ; Laboratories ; Mechanical ; Mechanical engineering. Machine design ; Mechanical instruments, equipment and techniques ; Microfluidics ; Micromechanical devices and systems ; micropneumatics ; Microvalves ; Orifices ; Packaging ; Physics ; Precision engineering, watch making ; Pressure control ; Prototypes ; Valves</subject><ispartof>Journal of microelectromechanical systems, 2006-10, Vol.15 (5), p.1281-1288</ispartof><rights>2007 INIST-CNRS</rights><rights>Copyright The Institute of Electrical and Electronics Engineers, Inc. (IEEE) 2006</rights><lds50>peer_reviewed</lds50><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c434t-5b2c44be0fee1f366dc2af07b1f710ad1dc9b424a6e7985beca11aea08f37fed3</citedby><cites>FETCH-LOGICAL-c434t-5b2c44be0fee1f366dc2af07b1f710ad1dc9b424a6e7985beca11aea08f37fed3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/1707789$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>230,314,552,780,784,796,885,27924,27925,54758</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/1707789$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=18197933$$DView record in Pascal Francis$$Hfree_for_read</backlink><backlink>$$Uhttps://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-11827$$DView record from Swedish Publication Index$$Hfree_for_read</backlink></links><search><creatorcontrib>Haasl, S.</creatorcontrib><creatorcontrib>Braun, S.</creatorcontrib><creatorcontrib>Ridgeway, A.S.</creatorcontrib><creatorcontrib>Sadoon, S.</creatorcontrib><creatorcontrib>van der Wijngaart, W.</creatorcontrib><creatorcontrib>Stemme, G.</creatorcontrib><title>Out-of-Plane Knife-Gate Microvalves for Controlling Large Gas Flows</title><title>Journal of microelectromechanical systems</title><addtitle>JMEMS</addtitle><description>This paper considers design issues for microvalves for large gas flow control. It introduces out-of-plane knife-gate microvalves as a novel design concept and a proportional microvalve concept for pressure control applications. The design of three different actuator-gate configurations and first prototypes are presented. The first valve prototypes feature thermal silicon-aluminum bimorph actuators and the pressure-flow performance per chip area of the demonstrator valve presented is greatly increased using out-of-plane actuation and an out-of-plane orifice. The characterization of the actuators and of the pressure-flow performance is presented. The prototype valve allows for a flow change of DeltaQ= 3.4 standard liters per minute (SLPM) at a pressure change of DeltaP= 95 kPa (P in = 196.3 kPa, P out = 101.3 kPa) on an active chip area of only 2.3times3.7 mm 2 1515</description><subject>Actuators</subject><subject>Applied fluid mechanics</subject><subject>Applied sciences</subject><subject>Bimorphs</subject><subject>Chips</subject><subject>Costs</subject><subject>Design engineering</subject><subject>Engineering</subject><subject>Exact sciences and technology</subject><subject>Fluid dynamics</subject><subject>Fluid flow</subject><subject>Fluidics</subject><subject>Fundamental areas of phenomenology (including applications)</subject><subject>Gas flow</subject><subject>Instruments, apparatus, components and techniques common to several branches of physics and astronomy</subject><subject>Laboratories</subject><subject>Mechanical</subject><subject>Mechanical engineering. Machine design</subject><subject>Mechanical instruments, equipment and techniques</subject><subject>Microfluidics</subject><subject>Micromechanical devices and systems</subject><subject>micropneumatics</subject><subject>Microvalves</subject><subject>Orifices</subject><subject>Packaging</subject><subject>Physics</subject><subject>Precision engineering, watch making</subject><subject>Pressure control</subject><subject>Prototypes</subject><subject>Valves</subject><issn>1057-7157</issn><issn>1941-0158</issn><issn>1941-0158</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2006</creationdate><recordtype>article</recordtype><sourceid>RIE</sourceid><sourceid>D8T</sourceid><recordid>eNpd0U1v1DAQBuAIgUQp_ADEJUJCvTRbj-PE9rFa2uVjV0Xi42pNvOPFJY0XO2nFv8dLKir1ZEt-ZqyZtyheA1sAMH32aXOx-brgjLULpRiX-klxBFpAxaBRT_OdNbKS0MjnxYuUrhkDIVR7VCyvprEKrvrS40Dl58E7qlY4UrnxNoZb7G8plS7EchmGMYa-98OuXGPcUbnCVF724S69LJ457BO9uj-Pi--XF9-WH6r11erj8nxdWVGLsWo6boXoiDkicHXbbi1Hx2QHTgLDLWyt7gQX2JLUqunIIgASMuVq6WhbHxenc990R_upM_vobzD-MQG9ee9_nJsQd-bX-NMAKC4zP5n5PobfE6XR3PhkqT9MGqZkNJO6bWvFs3z7SF6HKQ55FqOBc6Z422QEM8p7SSmS-_8_MHPIwPzLwBwyMHMGuebdfWNMFnsXcbA-PRQq0FnV2b2ZnSeih2fJpFS6_gvz-I9w</recordid><startdate>20061001</startdate><enddate>20061001</enddate><creator>Haasl, S.</creator><creator>Braun, S.</creator><creator>Ridgeway, A.S.</creator><creator>Sadoon, S.</creator><creator>van der Wijngaart, W.</creator><creator>Stemme, G.</creator><general>IEEE</general><general>Institute of Electrical and Electronics Engineers</general><general>The Institute of Electrical and Electronics Engineers, Inc. (IEEE)</general><scope>97E</scope><scope>RIA</scope><scope>RIE</scope><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>7TB</scope><scope>7U5</scope><scope>8FD</scope><scope>FR3</scope><scope>L7M</scope><scope>F28</scope><scope>ADTPV</scope><scope>AFDQA</scope><scope>AOWAS</scope><scope>D8T</scope><scope>D8V</scope><scope>ZZAVC</scope></search><sort><creationdate>20061001</creationdate><title>Out-of-Plane Knife-Gate Microvalves for Controlling Large Gas Flows</title><author>Haasl, S. ; Braun, S. ; Ridgeway, A.S. ; Sadoon, S. ; van der Wijngaart, W. ; Stemme, G.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c434t-5b2c44be0fee1f366dc2af07b1f710ad1dc9b424a6e7985beca11aea08f37fed3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2006</creationdate><topic>Actuators</topic><topic>Applied fluid mechanics</topic><topic>Applied sciences</topic><topic>Bimorphs</topic><topic>Chips</topic><topic>Costs</topic><topic>Design engineering</topic><topic>Engineering</topic><topic>Exact sciences and technology</topic><topic>Fluid dynamics</topic><topic>Fluid flow</topic><topic>Fluidics</topic><topic>Fundamental areas of phenomenology (including applications)</topic><topic>Gas flow</topic><topic>Instruments, apparatus, components and techniques common to several branches of physics and astronomy</topic><topic>Laboratories</topic><topic>Mechanical</topic><topic>Mechanical engineering. Machine design</topic><topic>Mechanical instruments, equipment and techniques</topic><topic>Microfluidics</topic><topic>Micromechanical devices and systems</topic><topic>micropneumatics</topic><topic>Microvalves</topic><topic>Orifices</topic><topic>Packaging</topic><topic>Physics</topic><topic>Precision engineering, watch making</topic><topic>Pressure control</topic><topic>Prototypes</topic><topic>Valves</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Haasl, S.</creatorcontrib><creatorcontrib>Braun, S.</creatorcontrib><creatorcontrib>Ridgeway, A.S.</creatorcontrib><creatorcontrib>Sadoon, S.</creatorcontrib><creatorcontrib>van der Wijngaart, W.</creatorcontrib><creatorcontrib>Stemme, G.</creatorcontrib><collection>IEEE All-Society Periodicals Package (ASPP) 2005-present</collection><collection>IEEE All-Society Periodicals Package (ASPP) 1998-Present</collection><collection>IEEE Electronic Library (IEL)</collection><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Electronics & Communications Abstracts</collection><collection>Mechanical & Transportation Engineering Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Engineering Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><collection>ANTE: Abstracts in New Technology & Engineering</collection><collection>SwePub</collection><collection>SWEPUB Kungliga Tekniska Högskolan full text</collection><collection>SwePub Articles</collection><collection>SWEPUB Freely available online</collection><collection>SWEPUB Kungliga Tekniska Högskolan</collection><collection>SwePub Articles full text</collection><jtitle>Journal of microelectromechanical systems</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Haasl, S.</au><au>Braun, S.</au><au>Ridgeway, A.S.</au><au>Sadoon, S.</au><au>van der Wijngaart, W.</au><au>Stemme, G.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Out-of-Plane Knife-Gate Microvalves for Controlling Large Gas Flows</atitle><jtitle>Journal of microelectromechanical systems</jtitle><stitle>JMEMS</stitle><date>2006-10-01</date><risdate>2006</risdate><volume>15</volume><issue>5</issue><spage>1281</spage><epage>1288</epage><pages>1281-1288</pages><issn>1057-7157</issn><issn>1941-0158</issn><eissn>1941-0158</eissn><coden>JMIYET</coden><abstract>This paper considers design issues for microvalves for large gas flow control. It introduces out-of-plane knife-gate microvalves as a novel design concept and a proportional microvalve concept for pressure control applications. The design of three different actuator-gate configurations and first prototypes are presented. The first valve prototypes feature thermal silicon-aluminum bimorph actuators and the pressure-flow performance per chip area of the demonstrator valve presented is greatly increased using out-of-plane actuation and an out-of-plane orifice. The characterization of the actuators and of the pressure-flow performance is presented. The prototype valve allows for a flow change of DeltaQ= 3.4 standard liters per minute (SLPM) at a pressure change of DeltaP= 95 kPa (P in = 196.3 kPa, P out = 101.3 kPa) on an active chip area of only 2.3times3.7 mm 2 1515</abstract><cop>New York, NY</cop><pub>IEEE</pub><doi>10.1109/JMEMS.2006.880279</doi><tpages>8</tpages><oa>free_for_read</oa></addata></record> |
| fulltext | fulltext_linktorsrc |
| identifier | ISSN: 1057-7157 |
| ispartof | Journal of microelectromechanical systems, 2006-10, Vol.15 (5), p.1281-1288 |
| issn | 1057-7157 1941-0158 1941-0158 |
| language | eng |
| recordid | cdi_ieee_primary_1707789 |
| source | IEEE Electronic Library (IEL) |
| subjects | Actuators Applied fluid mechanics Applied sciences Bimorphs Chips Costs Design engineering Engineering Exact sciences and technology Fluid dynamics Fluid flow Fluidics Fundamental areas of phenomenology (including applications) Gas flow Instruments, apparatus, components and techniques common to several branches of physics and astronomy Laboratories Mechanical Mechanical engineering. Machine design Mechanical instruments, equipment and techniques Microfluidics Micromechanical devices and systems micropneumatics Microvalves Orifices Packaging Physics Precision engineering, watch making Pressure control Prototypes Valves |
| title | Out-of-Plane Knife-Gate Microvalves for Controlling Large Gas Flows |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-05T16%3A18%3A12IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_RIE&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Out-of-Plane%20Knife-Gate%20Microvalves%20for%20Controlling%20Large%20Gas%20Flows&rft.jtitle=Journal%20of%20microelectromechanical%20systems&rft.au=Haasl,%20S.&rft.date=2006-10-01&rft.volume=15&rft.issue=5&rft.spage=1281&rft.epage=1288&rft.pages=1281-1288&rft.issn=1057-7157&rft.eissn=1941-0158&rft.coden=JMIYET&rft_id=info:doi/10.1109/JMEMS.2006.880279&rft_dat=%3Cproquest_RIE%3E2544581531%3C/proquest_RIE%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_pqid=912208265&rft_id=info:pmid/&rft_ieee_id=1707789&rfr_iscdi=true |