Radiation beam methods of electric field mapping of dielectrics

Radiation beam methods of electric field mapping of dielectrics

A set of electric field probing methods (nondestructive as well as destructive) in irradiated dielectrics using radiation beams has been developed. In various variants of the method a radiation flux is aligned either parallel or normal to the face of the dielectric slab. A layer in the bulk of the s...

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Bibliographische Detailangaben
Hauptverfasser: Boev, S.G., Paderin, V.A., Lopatkin, S.A., Kuzmin, A.N., Tyutnev, A.P.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Capacitance measurement
Dielectrics
Electrical resistance measurement
Electrodes
Electromagnetic measurements
Electromagnetic radiation
Integrated circuit measurements
Particle beams
Slabs
Strontium
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Zusammenfassung:A set of electric field probing methods (nondestructive as well as destructive) in irradiated dielectrics using radiation beams has been developed. In various variants of the method a radiation flux is aligned either parallel or normal to the face of the dielectric slab. A layer in the bulk of the sample, the whole sample, or its part may well be irradiated. As a radiation source, charged particle beams or electromagnetic radiation of broad frequency range can be used. Probing with light charged particles with ever increasing range allows one to achieve resolution of some mu m and a sensitivity of 10/sup 2/ to 10/sup 3/ V/cm.< >
DOI:10.1109/ISE.1991.167314