A processing quality prognostics scheme for plasma sputtering in TFT-LCD manufacturing

A novel quality prognostics scheme (QPS) for plasma sputtering in TFT-LCD manufacturing processes is proposed. The QPS consists of a conjecture model and a prediction model. The conjecture model can use processing parameters and sensor data to estimate the processing quality (sputtering thickness) i...

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Veröffentlicht in:	IEEE transactions on semiconductor manufacturing 2006-05, Vol.19 (2), p.183-194
Hauptverfasser:	SU, Yu-Chuan, HUNG, Min-Hsiung, CHENG, Fan-Tien, CHEN, Yeh-Tung
Format:	Artikel
Sprache:	eng
Schlagworte:	Accuracy Algorithm design and analysis Algorithms Applied sciences Conjecture model Display Electric, optical and optoelectronic circuits Electronics Exact sciences and technology General equipment and techniques Glass Instruments, apparatus, components and techniques common to several branches of physics and astronomy Manufacturing processes Mathematical models Mechanical factors Metrology Neural networks neural networks (NNs) Physics Plasma materials processing Prediction algorithms prediction model Predictive models quality prognostics scheme (QPS) reliance index Searching Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Semiconductors Sensors (chemical, optical, electrical, movement, gas, etc.) remote sensing Sputtering Studies Transistors Tuning virtual metrology
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