Acantilever Microphone Using Resonance of Closed-End Air Columns
This paper reports on a cantilever microphone for ultrasonic waves using resonance of a closed-end air column. The proposed microphone is composed of a cantilever and a cavity installed just under the cantilever. Sound waves of a specific frequency resonate in the cavity and the cantilever senses th...
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| creator | Yoshimi, S. Hoshino, K. Matsumoto, K. Shimoyama, I. |
| description | This paper reports on a cantilever microphone for ultrasonic waves using resonance of a closed-end air column. The proposed microphone is composed of a cantilever and a cavity installed just under the cantilever. Sound waves of a specific frequency resonate in the cavity and the cantilever senses the resonance. Therefore, the microphone acquires high sensitivity and sharp resonance at the resonant frequency. We measured the frequency responses of the cantilever and the microphone to evaluate the sensitivity in the range of 20 to 40 kHz. The microphone improved the sensitivity by 22 dB at the resonant frequency compared to the cantilever without a cavity. |
| doi_str_mv | 10.1109/MEMSYS.2006.1627864 |
| format | Conference Proceeding |
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The proposed microphone is composed of a cantilever and a cavity installed just under the cantilever. Sound waves of a specific frequency resonate in the cavity and the cantilever senses the resonance. Therefore, the microphone acquires high sensitivity and sharp resonance at the resonant frequency. We measured the frequency responses of the cantilever and the microphone to evaluate the sensitivity in the range of 20 to 40 kHz. The microphone improved the sensitivity by 22 dB at the resonant frequency compared to the cantilever without a cavity.</description><identifier>ISSN: 1084-6999</identifier><identifier>ISBN: 0780394755</identifier><identifier>ISBN: 9780780394759</identifier><identifier>DOI: 10.1109/MEMSYS.2006.1627864</identifier><language>eng</language><publisher>IEEE</publisher><subject>Acoustic sensors ; Equations ; Fabrication ; Infrared sensors ; Microphone arrays ; Piezoresistance ; Resonance ; Resonant frequency ; Surface resistance ; Ultrasonic variables measurement</subject><ispartof>19th IEEE International Conference on Micro Electro Mechanical Systems, 2006, p.574-577</ispartof><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/1627864$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>309,310,778,782,787,788,2054,4038,4039,27908,54903</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/1627864$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Yoshimi, S.</creatorcontrib><creatorcontrib>Hoshino, K.</creatorcontrib><creatorcontrib>Matsumoto, K.</creatorcontrib><creatorcontrib>Shimoyama, I.</creatorcontrib><title>Acantilever Microphone Using Resonance of Closed-End Air Columns</title><title>19th IEEE International Conference on Micro Electro Mechanical Systems</title><addtitle>MEMSYS</addtitle><description>This paper reports on a cantilever microphone for ultrasonic waves using resonance of a closed-end air column. The proposed microphone is composed of a cantilever and a cavity installed just under the cantilever. Sound waves of a specific frequency resonate in the cavity and the cantilever senses the resonance. Therefore, the microphone acquires high sensitivity and sharp resonance at the resonant frequency. We measured the frequency responses of the cantilever and the microphone to evaluate the sensitivity in the range of 20 to 40 kHz. The microphone improved the sensitivity by 22 dB at the resonant frequency compared to the cantilever without a cavity.</description><subject>Acoustic sensors</subject><subject>Equations</subject><subject>Fabrication</subject><subject>Infrared sensors</subject><subject>Microphone arrays</subject><subject>Piezoresistance</subject><subject>Resonance</subject><subject>Resonant frequency</subject><subject>Surface resistance</subject><subject>Ultrasonic variables measurement</subject><issn>1084-6999</issn><isbn>0780394755</isbn><isbn>9780780394759</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>2006</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><sourceid>RIE</sourceid><recordid>eNp9jrEOgjAUAJuoiah8AUt_AGyhFLpJCMaFRXRwIgQeWgMtadXEv9fB2VtuuOUQ8igJKCViWxZldamCkBAeUB4mKWcztCJJSiLBkjieI4eSlPlcCLFErrV38iUSMYuZg3ZZ26iHHOAFBpeyNXq6aQX4bKW64iNYrRrVAtY9zgdtofML1eFMGpzr4Tkqu0GLvhksuD-vkbcvTvnBlwBQT0aOjXnXv7Hof_0AtZA68Q</recordid><startdate>2006</startdate><enddate>2006</enddate><creator>Yoshimi, S.</creator><creator>Hoshino, K.</creator><creator>Matsumoto, K.</creator><creator>Shimoyama, I.</creator><general>IEEE</general><scope>6IE</scope><scope>6IH</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIO</scope></search><sort><creationdate>2006</creationdate><title>Acantilever Microphone Using Resonance of Closed-End Air Columns</title><author>Yoshimi, S. ; Hoshino, K. ; Matsumoto, K. ; Shimoyama, I.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-ieee_primary_16278643</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>2006</creationdate><topic>Acoustic sensors</topic><topic>Equations</topic><topic>Fabrication</topic><topic>Infrared sensors</topic><topic>Microphone arrays</topic><topic>Piezoresistance</topic><topic>Resonance</topic><topic>Resonant frequency</topic><topic>Surface resistance</topic><topic>Ultrasonic variables measurement</topic><toplevel>online_resources</toplevel><creatorcontrib>Yoshimi, S.</creatorcontrib><creatorcontrib>Hoshino, K.</creatorcontrib><creatorcontrib>Matsumoto, K.</creatorcontrib><creatorcontrib>Shimoyama, I.</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan (POP) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE Electronic Library (IEL)</collection><collection>IEEE Proceedings Order Plans (POP) 1998-present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Yoshimi, S.</au><au>Hoshino, K.</au><au>Matsumoto, K.</au><au>Shimoyama, I.</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>Acantilever Microphone Using Resonance of Closed-End Air Columns</atitle><btitle>19th IEEE International Conference on Micro Electro Mechanical Systems</btitle><stitle>MEMSYS</stitle><date>2006</date><risdate>2006</risdate><spage>574</spage><epage>577</epage><pages>574-577</pages><issn>1084-6999</issn><isbn>0780394755</isbn><isbn>9780780394759</isbn><abstract>This paper reports on a cantilever microphone for ultrasonic waves using resonance of a closed-end air column. The proposed microphone is composed of a cantilever and a cavity installed just under the cantilever. Sound waves of a specific frequency resonate in the cavity and the cantilever senses the resonance. Therefore, the microphone acquires high sensitivity and sharp resonance at the resonant frequency. We measured the frequency responses of the cantilever and the microphone to evaluate the sensitivity in the range of 20 to 40 kHz. The microphone improved the sensitivity by 22 dB at the resonant frequency compared to the cantilever without a cavity.</abstract><pub>IEEE</pub><doi>10.1109/MEMSYS.2006.1627864</doi></addata></record> |
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| ispartof | 19th IEEE International Conference on Micro Electro Mechanical Systems, 2006, p.574-577 |
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| language | eng |
| recordid | cdi_ieee_primary_1627864 |
| source | IEEE Electronic Library (IEL) Conference Proceedings |
| subjects | Acoustic sensors Equations Fabrication Infrared sensors Microphone arrays Piezoresistance Resonance Resonant frequency Surface resistance Ultrasonic variables measurement |
| title | Acantilever Microphone Using Resonance of Closed-End Air Columns |
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