Novel Measurement System of the Friction Coefficients for the Drie Sidewalls

A silicon friction meter employing simple beam springs with holding and driving comb actuators was suggested to evaluate the static and the dynamic friction coefficients of the DRIE silicon sidewalls. After moving the shuttle to a certain position, a symmetric normal force was applied on the sidewal...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Il-Han Hwang, Jong-Hyun Lee
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Actuators Atomic force microscopy Displacement measurement Friction Optical fibers Optical interferometry Plasma welding Silicon compounds Springs Voltage
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