Novel Measurement System of the Friction Coefficients for the Drie Sidewalls
A silicon friction meter employing simple beam springs with holding and driving comb actuators was suggested to evaluate the static and the dynamic friction coefficients of the DRIE silicon sidewalls. After moving the shuttle to a certain position, a symmetric normal force was applied on the sidewal...
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| creator | Il-Han Hwang Jong-Hyun Lee |
| description | A silicon friction meter employing simple beam springs with holding and driving comb actuators was suggested to evaluate the static and the dynamic friction coefficients of the DRIE silicon sidewalls. After moving the shuttle to a certain position, a symmetric normal force was applied on the sidewalls of the shuttle by the holding actuators. By ramp increasing the driving voltage, the slide distance was measured to evaluate the static and dynamic friction coefficients considering the spring nonlinearity. The effects of the contact width, the number of contact points and the normal force on friction coefficients were investigated. |
| doi_str_mv | 10.1109/MEMSYS.2006.1627773 |
| format | Conference Proceeding |
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After moving the shuttle to a certain position, a symmetric normal force was applied on the sidewalls of the shuttle by the holding actuators. By ramp increasing the driving voltage, the slide distance was measured to evaluate the static and dynamic friction coefficients considering the spring nonlinearity. The effects of the contact width, the number of contact points and the normal force on friction coefficients were investigated.</description><identifier>ISSN: 1084-6999</identifier><identifier>ISBN: 0780394755</identifier><identifier>ISBN: 9780780394759</identifier><identifier>DOI: 10.1109/MEMSYS.2006.1627773</identifier><language>eng</language><publisher>IEEE</publisher><subject>Actuators ; Atomic force microscopy ; Displacement measurement ; Friction ; Optical fibers ; Optical interferometry ; Plasma welding ; Silicon compounds ; Springs ; Voltage</subject><ispartof>19th IEEE International Conference on Micro Electro Mechanical Systems, 2006, p.210-213</ispartof><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/1627773$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>309,310,780,784,789,790,2056,4048,4049,27924,54919</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/1627773$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Il-Han Hwang</creatorcontrib><creatorcontrib>Jong-Hyun Lee</creatorcontrib><title>Novel Measurement System of the Friction Coefficients for the Drie Sidewalls</title><title>19th IEEE International Conference on Micro Electro Mechanical Systems</title><addtitle>MEMSYS</addtitle><description>A silicon friction meter employing simple beam springs with holding and driving comb actuators was suggested to evaluate the static and the dynamic friction coefficients of the DRIE silicon sidewalls. After moving the shuttle to a certain position, a symmetric normal force was applied on the sidewalls of the shuttle by the holding actuators. By ramp increasing the driving voltage, the slide distance was measured to evaluate the static and dynamic friction coefficients considering the spring nonlinearity. The effects of the contact width, the number of contact points and the normal force on friction coefficients were investigated.</description><subject>Actuators</subject><subject>Atomic force microscopy</subject><subject>Displacement measurement</subject><subject>Friction</subject><subject>Optical fibers</subject><subject>Optical interferometry</subject><subject>Plasma welding</subject><subject>Silicon compounds</subject><subject>Springs</subject><subject>Voltage</subject><issn>1084-6999</issn><isbn>0780394755</isbn><isbn>9780780394759</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>2006</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><sourceid>RIE</sourceid><recordid>eNotj81Kw0AURgdUsK0-QTfzAol3Mr93KbW1QqKL6MJVSZM7OJI0MhOVvr2iXX2LczjwMbYUkAsBeFOtq_q1zgsAkwtTWGvlGZuDdSBRWa3P2UyAU5lBxEs2T-kdoAChcMbKx_GLel5Rkz4jDXSYeH1MEw189Hx6I76JoZ3CeOCrkbwPbfhVEvdj_KN3MRCvQ0ffTd-nK3bhmz7R9WkX7GWzfl5ts_Lp_mF1W2ZBWD1l6LVxWiMqZ6AlL61yFrXXWpDFznfOtMW-U3KvyIKDgoQl2SiJZMgbJxds-d8NRLT7iGFo4nF3ei5_ANf_TU0</recordid><startdate>2006</startdate><enddate>2006</enddate><creator>Il-Han Hwang</creator><creator>Jong-Hyun Lee</creator><general>IEEE</general><scope>6IE</scope><scope>6IH</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIO</scope></search><sort><creationdate>2006</creationdate><title>Novel Measurement System of the Friction Coefficients for the Drie Sidewalls</title><author>Il-Han Hwang ; Jong-Hyun Lee</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-i175t-9f56855994860cef3748795f551e79dfd86c2bd43b4e70802e17e3a439e6ef683</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>2006</creationdate><topic>Actuators</topic><topic>Atomic force microscopy</topic><topic>Displacement measurement</topic><topic>Friction</topic><topic>Optical fibers</topic><topic>Optical interferometry</topic><topic>Plasma welding</topic><topic>Silicon compounds</topic><topic>Springs</topic><topic>Voltage</topic><toplevel>online_resources</toplevel><creatorcontrib>Il-Han Hwang</creatorcontrib><creatorcontrib>Jong-Hyun Lee</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan (POP) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE Electronic Library (IEL)</collection><collection>IEEE Proceedings Order Plans (POP) 1998-present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Il-Han Hwang</au><au>Jong-Hyun Lee</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>Novel Measurement System of the Friction Coefficients for the Drie Sidewalls</atitle><btitle>19th IEEE International Conference on Micro Electro Mechanical Systems</btitle><stitle>MEMSYS</stitle><date>2006</date><risdate>2006</risdate><spage>210</spage><epage>213</epage><pages>210-213</pages><issn>1084-6999</issn><isbn>0780394755</isbn><isbn>9780780394759</isbn><abstract>A silicon friction meter employing simple beam springs with holding and driving comb actuators was suggested to evaluate the static and the dynamic friction coefficients of the DRIE silicon sidewalls. After moving the shuttle to a certain position, a symmetric normal force was applied on the sidewalls of the shuttle by the holding actuators. By ramp increasing the driving voltage, the slide distance was measured to evaluate the static and dynamic friction coefficients considering the spring nonlinearity. The effects of the contact width, the number of contact points and the normal force on friction coefficients were investigated.</abstract><pub>IEEE</pub><doi>10.1109/MEMSYS.2006.1627773</doi><tpages>4</tpages></addata></record> |
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| identifier | ISSN: 1084-6999 |
| ispartof | 19th IEEE International Conference on Micro Electro Mechanical Systems, 2006, p.210-213 |
| issn | 1084-6999 |
| language | eng |
| recordid | cdi_ieee_primary_1627773 |
| source | IEEE Electronic Library (IEL) Conference Proceedings |
| subjects | Actuators Atomic force microscopy Displacement measurement Friction Optical fibers Optical interferometry Plasma welding Silicon compounds Springs Voltage |
| title | Novel Measurement System of the Friction Coefficients for the Drie Sidewalls |
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