Dielectric Charge Measurement in Capacitive Microwave Shunt Switches

The use of microelectromechanical systems as electronic switches in circuits for microwave frequency applications has grown considerably in the past decade. One phenomenon that limits the reliability of these switches is dielectric charging. Using a non-contact technique for measuring dielectric cha...

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Hauptverfasser:	Schultz, J.S., Firebaugh, S.L., Charles, H.K., Edwards, R.L., Keeney, A.C., Wilderson, S.F.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Bridge circuits Charge measurement Communication switching Conductors dielectric charging Dielectric measurements Electrostatics MEMS Microelectromechanical devices micromachining Micromechanical devices microwave Power semiconductor switches Radiofrequency microelectromechanical systems reliability switches Voltage
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