Design, development and operational concept of an advanced MEMS IR source for miniaturized gas sensor systems

Miniaturized non-dispersive infrared (NDIR) gas sensing systems require as key components bright thermal infrared (IR) sources that can be modulated at reasonably high speed to allow high-sensitivity lock-in detection to be applied. In addition such sources should provide a stable emission n affecte...

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Bibliographische Detailangaben

Hauptverfasser:	Spannhake, J., Schulz, O., Helwig, A., Miiller, G., Doll, T.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Biomembranes Energy consumption Gas detectors Infrared detectors Infrared sensors Micromechanical devices Silicon carbide Silicon on insulator technology Temperature sensors Thermal conductivity
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