Optical MEMS pressure and vibration sensors using integrated optical ring resonators

In this paper we propose and analyse novel optical MEMS based pressure and vibration sensors utilising integrated optical ring resonators. The wavelength shift of light propagating in the resonator, located over the micro-mechanical structure, due to stress induced refractive change because of appli...

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Bibliographische Detailangaben

Hauptverfasser:	Kumar Pattnaik, P., Vijayaaditya, B., Srinivas, T., Selvarajan, A.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Integrated optics Micromechanical devices Optical refraction Optical resonators Optical ring resonators Optical sensors Optical variables control Optical waveguides Stress Vibration measurement
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