High Surface Planarity Die Bonding of Large Optical Chips

Analog Spatial Light Modulators (ASLM) are highly specialised MOEMS devices, which, in our case, are used as programmable mask in extremely high-resolution DUV mask writing systems. Resolution, precision, contrast and optical uniformity of the mask patterns produced by this new type of mask writers...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Kunzelmann, U., Wagner, M., Schenk, H., Lakner, H.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Advanced Chip Bonding Area measurement Bonding Chip Planarity Global Flatness Micro-Optical-Mechanical Systems (MOEMS) Microassembly Modulation coding Optical devices Optical modulation Semiconductor device measurement Spatial resolution Ultraviolet sources Writing
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