A MEMS based microelectrode sensor with integrated signal processing circuitry

Microelectrodes have been developed over the last few years with tip diameters of 1-10 /spl mu/m, but they are fragile and susceptible to electrical interference. In addition, they are difficult to manufacture and operate, and are often unsuitable for measurement in small volumes of liquid or in soi...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Angan Das, Bhadri, P.R., Kumar, A.S., Jin-hwan Lee, Papautsky, I., Beyette, F.R., Am Jang, Bishop, P.L., Timmons, W.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Integrated circuit measurements Interference Manufacturing Microelectrodes Micromechanical devices Sensor arrays Sensor phenomena and characterization Sensor systems Signal processing Volume measurement
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