MEMS-based quartz oscillators and filters for on-chip integration

We report on the development of a new microelectronicmechanical system (MEMS)-based quartz resonator technology that allows for the processing and integration of VHF to UHF high-Q oscillators and filters with high-speed silicon or III-V electronics. This paper describes the first demonstration of pr...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Kubena, R.L., Stratton, F.P., Chang, D.T., Joyce, R.J., Hsu, T.Y., Lim, M.K., M'Closkey, R.T.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	III-V semiconductor materials Impedance measurement Oscillators Phase noise Prototypes Q measurement Resonator filters Silicon Temperature sensors UHF measurements
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