MEMS-based quartz oscillators and filters for on-chip integration
We report on the development of a new microelectronicmechanical system (MEMS)-based quartz resonator technology that allows for the processing and integration of VHF to UHF high-Q oscillators and filters with high-speed silicon or III-V electronics. This paper describes the first demonstration of pr...
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| creator | Kubena, R.L. Stratton, F.P. Chang, D.T. Joyce, R.J. Hsu, T.Y. Lim, M.K. M'Closkey, R.T. |
| description | We report on the development of a new microelectronicmechanical system (MEMS)-based quartz resonator technology that allows for the processing and integration of VHF to UHF high-Q oscillators and filters with high-speed silicon or III-V electronics. This paper describes the first demonstration of prototype oscillators and filters using this newly developed technology. We present impedance, Q, and temperature sensitivity data of UHF resonators along with phase noise and Allan deviation measurements. Our first 2-pole filter data showing low insertion loss are also presented. Finally, the results of power handling measurements are described for applications where high levels of background signals are present. |
| doi_str_mv | 10.1109/FREQ.2005.1573913 |
| format | Conference Proceeding |
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This paper describes the first demonstration of prototype oscillators and filters using this newly developed technology. We present impedance, Q, and temperature sensitivity data of UHF resonators along with phase noise and Allan deviation measurements. Our first 2-pole filter data showing low insertion loss are also presented. Finally, the results of power handling measurements are described for applications where high levels of background signals are present.</description><identifier>ISSN: 2327-1914</identifier><identifier>ISBN: 0780390539</identifier><identifier>ISBN: 9780780390539</identifier><identifier>DOI: 10.1109/FREQ.2005.1573913</identifier><language>eng</language><publisher>IEEE</publisher><subject>III-V semiconductor materials ; Impedance measurement ; Oscillators ; Phase noise ; Prototypes ; Q measurement ; Resonator filters ; Silicon ; Temperature sensors ; UHF measurements</subject><ispartof>Proceedings of the 2005 IEEE International Frequency Control Symposium and Exposition, 2005, 2005, p.6 pp.</ispartof><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/1573913$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>309,310,780,784,789,790,2058,4050,4051,27925,54920</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/1573913$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Kubena, R.L.</creatorcontrib><creatorcontrib>Stratton, F.P.</creatorcontrib><creatorcontrib>Chang, D.T.</creatorcontrib><creatorcontrib>Joyce, R.J.</creatorcontrib><creatorcontrib>Hsu, T.Y.</creatorcontrib><creatorcontrib>Lim, M.K.</creatorcontrib><creatorcontrib>M'Closkey, R.T.</creatorcontrib><title>MEMS-based quartz oscillators and filters for on-chip integration</title><title>Proceedings of the 2005 IEEE International Frequency Control Symposium and Exposition, 2005</title><addtitle>FREQ</addtitle><description>We report on the development of a new microelectronicmechanical system (MEMS)-based quartz resonator technology that allows for the processing and integration of VHF to UHF high-Q oscillators and filters with high-speed silicon or III-V electronics. This paper describes the first demonstration of prototype oscillators and filters using this newly developed technology. We present impedance, Q, and temperature sensitivity data of UHF resonators along with phase noise and Allan deviation measurements. Our first 2-pole filter data showing low insertion loss are also presented. Finally, the results of power handling measurements are described for applications where high levels of background signals are present.</description><subject>III-V semiconductor materials</subject><subject>Impedance measurement</subject><subject>Oscillators</subject><subject>Phase noise</subject><subject>Prototypes</subject><subject>Q measurement</subject><subject>Resonator filters</subject><subject>Silicon</subject><subject>Temperature sensors</subject><subject>UHF measurements</subject><issn>2327-1914</issn><isbn>0780390539</isbn><isbn>9780780390539</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>2005</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><sourceid>RIE</sourceid><recordid>eNotj81OAyEYAEnUxFr7AMYLL8D6fbCwcGyarTVpY_w7N8Cyill3K-BBn14Te5o5TTKEXCFUiGBu1o_tQ8UBZIWyEQbFCbmARoMwIIU5JTMueMPQYH1OFjm_AwAaY5SUM7Lctbsn5mwOHf38sqn80Cn7OAy2TClTO3a0j0MJf95PiU4j82_xQONYwmuyJU7jJTnr7ZDD4sg5eVm3z6sN297f3q2WWxY56sIsBKidQjSq4UEYZTsnVYcasA_Beg-1CiictU5obzrtuW60NNJxD6LnYk6u_7sxhLA_pPhh0_f-eCx-ASgkSfM</recordid><startdate>2005</startdate><enddate>2005</enddate><creator>Kubena, R.L.</creator><creator>Stratton, F.P.</creator><creator>Chang, D.T.</creator><creator>Joyce, R.J.</creator><creator>Hsu, T.Y.</creator><creator>Lim, M.K.</creator><creator>M'Closkey, R.T.</creator><general>IEEE</general><scope>6IE</scope><scope>6IH</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIO</scope></search><sort><creationdate>2005</creationdate><title>MEMS-based quartz oscillators and filters for on-chip integration</title><author>Kubena, R.L. ; Stratton, F.P. ; Chang, D.T. ; Joyce, R.J. ; Hsu, T.Y. ; Lim, M.K. ; M'Closkey, R.T.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-i218t-a0e04b6119672e396adb56d1801feeacc046e13baab38c9d8c2878595b2c03f23</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>2005</creationdate><topic>III-V semiconductor materials</topic><topic>Impedance measurement</topic><topic>Oscillators</topic><topic>Phase noise</topic><topic>Prototypes</topic><topic>Q measurement</topic><topic>Resonator filters</topic><topic>Silicon</topic><topic>Temperature sensors</topic><topic>UHF measurements</topic><toplevel>online_resources</toplevel><creatorcontrib>Kubena, R.L.</creatorcontrib><creatorcontrib>Stratton, F.P.</creatorcontrib><creatorcontrib>Chang, D.T.</creatorcontrib><creatorcontrib>Joyce, R.J.</creatorcontrib><creatorcontrib>Hsu, T.Y.</creatorcontrib><creatorcontrib>Lim, M.K.</creatorcontrib><creatorcontrib>M'Closkey, R.T.</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan (POP) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE Electronic Library (IEL)</collection><collection>IEEE Proceedings Order Plans (POP) 1998-present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Kubena, R.L.</au><au>Stratton, F.P.</au><au>Chang, D.T.</au><au>Joyce, R.J.</au><au>Hsu, T.Y.</au><au>Lim, M.K.</au><au>M'Closkey, R.T.</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>MEMS-based quartz oscillators and filters for on-chip integration</atitle><btitle>Proceedings of the 2005 IEEE International Frequency Control Symposium and Exposition, 2005</btitle><stitle>FREQ</stitle><date>2005</date><risdate>2005</risdate><spage>6 pp.</spage><pages>6 pp.-</pages><issn>2327-1914</issn><isbn>0780390539</isbn><isbn>9780780390539</isbn><abstract>We report on the development of a new microelectronicmechanical system (MEMS)-based quartz resonator technology that allows for the processing and integration of VHF to UHF high-Q oscillators and filters with high-speed silicon or III-V electronics. This paper describes the first demonstration of prototype oscillators and filters using this newly developed technology. We present impedance, Q, and temperature sensitivity data of UHF resonators along with phase noise and Allan deviation measurements. Our first 2-pole filter data showing low insertion loss are also presented. Finally, the results of power handling measurements are described for applications where high levels of background signals are present.</abstract><pub>IEEE</pub><doi>10.1109/FREQ.2005.1573913</doi><oa>free_for_read</oa></addata></record> |
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| identifier | ISSN: 2327-1914 |
| ispartof | Proceedings of the 2005 IEEE International Frequency Control Symposium and Exposition, 2005, 2005, p.6 pp. |
| issn | 2327-1914 |
| language | eng |
| recordid | cdi_ieee_primary_1573913 |
| source | IEEE Electronic Library (IEL) Conference Proceedings |
| subjects | III-V semiconductor materials Impedance measurement Oscillators Phase noise Prototypes Q measurement Resonator filters Silicon Temperature sensors UHF measurements |
| title | MEMS-based quartz oscillators and filters for on-chip integration |
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