Effect of Temperature on MEMS Vibratory Rate Gyroscope

We report the temperature dependence of the JPL/Boeing MEMS second generation post resonator gyroscopes and determine the effect of hysteresis over the range 35degC to 65degC. The results indicate a strong linear dependence of the drive frequency and sense frequency with temperature of 0.093Hz/degC...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Keymeulen, D., Peay, C., Yee, K., Li, D.L.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Electrodes Frequency Gyroscopes Micromechanical devices Optical resonators Propulsion Stability Temperature dependence Temperature sensors Voltage
Online-Zugang:	Volltext bestellen
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